Abstract: A shadow mask having two or more levels of openings enables selective step coverage of micro-fabricated structures within a micro-optical bench device. The shadow mask includes a first opening within a top surface of the shadow mask and a second opening within the bottom surface of the shadow mask. The second opening is aligned with the first opening and has a second width less than a first width of the first opening. An overlap between the first opening and the second opening forms a hole within the shadow mask through which selective coating of micro-fabricated structures within the micro-optical bench device may occur.

Abstract: Techniques are described that enables controlling the TNULL characteristic of a self-compensated oscillator by controlling the magnitude and direction of the frequency deviation versus temperature, and thus, compensating the frequency deviation.

Abstract: A mixed-domain circuit has a differential pair of Digital-to-Time Converters (DTCs), one receiving a reference clock and the other receiving a feedback clock. A Time-to-Digital Converter (TDC) compares outputs from the differential pair of DTCs and generates a digital error value that controls a digital loop filter that controls a Digitally-Controlled Oscillator (DCO) that generates an output clock. A Multi-Modulus Divider (MMD) generates the feedback clock. An accumulated modulation from a delta-sigma modulator is compared to the digital error value by a Least-Mean Square (LMS) correlator to adjust supply voltage or current sources in the pair of DTCs to compensate for errors. A capacitor in each DTC has a charging time adjusted by the accumulated modulation. The DTC can be reduced to a Time-to-Voltage Converter (TVC) and the analog voltages on the capacitors input to an Analog-to-Digital Converter (ADC) to generate the digital error value.

Abstract: A feedback divider in a mixed-signal circuit is modulated by a frequency control word controlling a delta-sigma modulator. An accumulated quantization error from the delta-sigma modulator is compared to a residual error in the circuit by a Least-Mean Square (LMS) correlator for gain calibration to adjust for linear errors. Upper bits of the accumulated quantization error access a lookup table to find two outputs of the compensation function that are interpolated between using lower bits of the accumulated quantization error. The interpolated result is an adjustment subtracted from the loop to compensate for non-linear errors. A set of orthogonal kernels is generated from the accumulated quantization error and calibrated using another LMS correlator and inverse transformed to generate updates to the non-linear compensation function in the lookup table. The kernels can be Walsh Hadamard (WH) and the inverse transformer an inverse WH transformer.

Abstract: A feedback divider in a mixed-signal circuit is modulated by a frequency control word controlling a delta-sigma modulator. An accumulated quantization error from the delta-sigma modulator is compared to a residual error in the circuit by a Least-Mean Square (LMS) correlator for gain calibration to adjust for linear errors. Upper bits of the accumulated quantization error access a lookup table to find two outputs of the compensation function that are interpolated between using lower bits of the accumulated quantization error. The interpolated result is an adjustment subtracted from the loop to compensate for non-linear errors. A set of orthogonal kernels is generated from the accumulated quantization error and calibrated using another LMS correlator and inverse transformed to generate updates to the non-linear compensation function in the lookup table. The kernels can be Walsh Hadamard (WH) and the inverse transformer an inverse WH transformer.

Abstract: A feedback divider in a mixed-signal circuit is modulated by a frequency control word controlling a delta-sigma modulator. An accumulated quantization error from the delta-sigma modulator is compared to a residual error in the circuit by a Least-Mean Square (LMS) correlator for gain calibration to adjust for linear errors. Upper bits of the accumulated quantization error access a lookup table to find two outputs of the compensation function that are interpolated between using lower bits of the accumulated quantization error. The interpolated result is an adjustment subtracted from the loop to compensate for non-linear errors. A set of orthogonal kernels is generated from the accumulated quantization error and calibrated using another LMS correlator and inverse transformed to generate updates to the non-linear compensation function in the lookup table. The kernels can be Walsh Hadamard (WH) and the inverse transformer an inverse WH transformer.

Abstract: Aspects of the disclosure relate to an integrated spectral unit including a micro-electro-mechanical systems (MEMS) interferometer fabricated within a first substrate and a light redirecting structure integrated on a second substrate, where the second substrate is coupled to the first substrate. The light redirecting structure includes at least one mirror for receiving an input light beam propagating in an out-of-plane direction with respect to the first substrate and redirecting the input light beam to an in-plane direction with respect to the first substrate towards the MEMS interferometer.

Abstract: A spectrometer with increased optical throughput and/or spectral resolution includes a plurality of interferometers coupled in parallel. An optical splitter divides a source light beam into a plurality of input beams and directs each of the input beams to a respective one of the plurality of interferometers. One or more detectors are optically coupled to receive a respective output from each of the plurality of interferometers and is configured to detect an interferogram produced as a result of the outputs.

Abstract: A Micro-Electro-Mechanical System (MEMS) apparatus provides for self-calibration of mirror positioning of a moveable mirror of an interferometer. At least one mirror in the MEMS apparatus includes a non-planar surface. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS apparatus includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at multiple reference positions of the moveable mirror corresponding to a center burst and one or more secondary bursts of an interferogram produced by the interferometer based on the non-planar surface. A calibration module uses the actuator capacitances at the reference positions to compensate for any drift in the capacitive sensing circuit.

Abstract: A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometer includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit.

Abstract: A highly integrated monolithic self-compensated oscillator (SCO) with high frequency stability versus temperature variations is described, together with a cost effective single insertion point trimming (SPT) algorithm. The SPT is utilized to adjust the phase and frequency of the SCO to meet frequency stability versus temperature and frequency accuracy requirements for a reference clock. The techniques used in the SPT algorithm provide a robust, fast and low testing cost for the SCO. Moreover, the concepts and techniques utilized in the SCO SPT can be used effectively for any temperature compensated oscillator (TCO) including TCXO, MEMS, FBAR and RC oscillators. Additionally, the described SPT algorithm is capable of measuring the temperature sensitivity of any oscillator, estimating suitable temperature compensation parameters and adjusting the oscillator frequency to the required value simultaneously.

Abstract: An optical system, such as an integrated monolithic optical bench, includes a three-dimensional curved optical element etched in a substrate such that the optical axis of the optical system lies within the substrate and is parallel to the plane of the substrate.

Abstract: In a high-performance interface circuit for micro-electromechanical (MEMS) inertial sensors, an excitation signal (used to detect capacitance variation) is used to control the value of an actuation signal bit stream to allow the dynamic range of both actuation and detection paths to be maximized and to prevent folding of high frequency components of the actuation bit stream due to mixing with the excitation signal. In another aspect, the effects of coupling between actuation signals and detection signals may be overcome by performing a disable/reset of at least one of and preferably both of the detection circuitry and the MEMS detection electrodes during actuation signal transitions. In a still further aspect, to get a demodulated signal to have a low DC component, fine phase adjustment may be achieved by configuring filters within the sense and drive paths to have slightly different center frequencies and hence slightly different delays.

Abstract: A spatial splitting-based optical Micro Electro-Mechanical Systems (MEMS) Interferometer includes a spatial splitter for spatially splitting an input beam into two interferometer beams and a spatial combiner for spatially combining the two interferometer beams. A MEMS moveable mirror is provided to produce an optical path difference between the first interferometer beam and the second interferometer beam.

Abstract: A substantially temperature-independent LC-based oscillator uses bias control techniques. Temperature independence may be achieved by controlling the harmonic frequency content of the output of the oscillator by controlling the amplitude. Amplitude control may be achieved by inserting a control mechanism in the feedback loop of the oscillator.

Abstract: Operating capacitive sensors in force feedback mode has many benefits, such as improved bandwidth, and lower sensitivity to process and temperature variation. To overcome, the non-linearity of the voltage-to-force relation in capacitive feedback, a two-level feedback signal is often used. Therefore, a single-bit ?-? modulator represents a practical way to implement capacitive sensors interface circuits. However, high-Q parasitic modes that exist in high-Q sensors (operating in vacuum) cause a stability problem for the ?-? loop, and hence, limit the applicability of ?-? technique to such sensors. A solution is provided that allows stabilizing the ?-? loop, in the presence of high-Q parasitic modes. The solution is applicable to low or high order ?-? based interfaces for capacitive sensors.

Abstract: A Micro Electro-Mechanical System (MEMS) interferometer system utilizes a capacitive sensing circuit to determine the position of a moveable mirror. An electrostatic MEMS actuator is coupled to the moveable mirror to cause a displacement thereof. The capacitive sensing circuit senses the current capacitance of the MEMS actuator and determines the position of the moveable mirror based on the current capacitance of the MEMS actuator.

Abstract: A substantially temperature-independent LC-based oscillator is achieved using an LC tank that generates a tank oscillation at a phase substantially equal to a temperature null phase. The temperature null phase is a phase of the LC tank at which variations in frequency of an output oscillation of the LC-based oscillator with temperature changes are minimized. The LC-based oscillator further includes frequency stabilizer circuitry coupled to the LC tank to cause the LC tank to oscillate at the phase substantially equal to the temperature null phase.

Abstract: Operating capacitive sensors in force feedback mode has many benefits, such as improved bandwidth, and lower sensitivity to process and temperature variation. To overcome, the non-linearity of the voltage-to-force relation in capacitive feedback, a two-level feedback signal is often used. Therefore, a single-bit ?-? modulator represents a practical way to implement capacitive sensors interface circuits. However, high-Q parasitic modes that exist in high-Q sensors (operating in vacuum) cause a stability problem for the ?-? loop, and hence, limit the applicability of ?-? technique to such sensors. A solution is provided that allows stabilizing the ?-? loop, in the presence of high-Q parasitic modes. The solution is applicable to low or high order ?-? based interfaces for capacitive sensors.

Abstract: A highly integrated monolithic self-compensated oscillator (SCO) with high frequency stability versus temperature variations is described, together with a cost effective single insertion point trimming (SPT) algorithm. The SPT is utilized to adjust the phase and frequency of the SCO to meet frequency stability versus temperature and frequency accuracy requirements for a reference clock. The techniques used in the SPT algorithm provide a robust, fast and low testing cost for the SCO. Moreover, the concepts and techniques utilized in the SCO SPT can be used effectively for any temperature compensated oscillator (TCO) including TCXO, MEMS, FBAR and RC oscillators. Additionally, the described SPT algorithm is capable of measuring the temperature sensitivity of any oscillator, estimating suitable temperature compensation parameters and adjusting the oscillator frequency to the required value simultaneously.