Patents Assigned to Sihn-Etsu Chemical Co., Ltd.
  • Ester compounds
    Patent number: 6680389
    Abstract: Acrylic esters containing fluorine at &agr;-position and having a lactone ring introduced into the ester side chain thereof are novel. Polymers obtained from the acrylic esters have a high transparency to VUV and good adhesion to substrates and are used to formulate chemically amplified resist compositions for lithographic microfabrication.
    Type: Grant
    Filed: June 25, 2002
    Date of Patent: January 20, 2004
    Assignees: Sihn-Etsu Chemical Co., Ltd., Central Glass Co., Ltd.
    Inventors: Yuji Harada, Jun Hatakeyama, Yoshio Kawai, Michitaka Ootani, Satoru Miyazawa, Kentaro Tsutsumi, Kazuhiko Maeda