Abstract: A computer-readable memory product containing a program suitable for controlling a substrate surface finishing apparatus. In one embodiment, the computer-readable memory product contains program code suitable for re-configuring, with appropriate apparatus component changes, a double-brush scrubber into a touch polish surface finishing system. In another embodiment, the computer-readable memory product contains program code suitable for controlling a substrate surface finishing system to selectively process a portion or portions of the substrate, such as removing a ridge of material from a perimeter portion of the substrate, or smoothing a step between a thin film layer bonded to a handle wafer.