Abstract: The invention relates to a process and a device for the production of electrically conductive passages in semiconductor components preferably positioned on a semiconductor, by means of thermo-migration through the production of a temperature gradient between two opposing outer surfaces of the semiconductor components and application of a conductive doping substance to a cooler outer surface. One outer surface of the semiconductor is positioned on a cooled sample take-up and the opposing outer surface is exposed to heat radiation, which can be controlled both with regard to its total efficiency and its efficiency distribution over the surface of the semiconductor. The total efficiency and/or the efficiency distribution of the heat radiation is adjusted depending upon the temperature measured on at least one temperature measurement point on the semiconductor and/or a semiconductor component.
Type:
Grant
Filed:
December 20, 1999
Date of Patent:
October 9, 2001
Assignees:
Dr. Johannes Heidenhain GmbH, Silicon Sensor GmbH
Inventors:
Bernd Kriegel, Frank Kudella, Rene Arnold
Abstract: The invention relates to an opto-electronic sensor component comprising the following: a first semiconducting layer of predetermined conductivity type and a second layer of different semiconductor or metal conductivity type; a transition region between the two layers; at least one surface region through which the electromagnetic radiation to be detected can pass into the transition region (radiation-side surface region); and an electrode for each layer to connect both layers to an electrical circuit. The electrodes of the two layers are mounted on a surface of the component opposite a radiation-side surface region. This simplifies connection of the sensor component to an electrical circuit mounted on a circuit board or the like.
Type:
Grant
Filed:
June 18, 1998
Date of Patent:
January 16, 2001
Assignees:
Dr. Johanne Heidenhain GmbH, Silicon Sensor GmbH
Inventors:
Hermann Hofbauer, Bernd Kriegel, Peter Speckbauer, Martin Ullrich, Ruport Dietl