Abstract: A solar cell comprises a region formed on a substrate. The region has a dopant. The region can be one of a selective emitter and a back surface field of the solar cell. A grid line is deposited over a first portion of the region. A dopant profile is generated that has a concentration of electrically active dopants at a surface portion on the first portion of the region smaller than the concentration of electrically active dopants at a distance away from the surface portion. In an embodiment, an electrical activity of a portion of the dopant is deactivated in a second portion of the region outside the grid line. The grid line is used as a mask for deactivating the dopant.