Patents Assigned to Siliconeware Precision Industries Co., Ltd.
  • Patent number: 6258705
    Abstract: A method is proposed for forming circuit probing (CP) contact points on fine pitch peripheral bond pads (PBP) on a flip chip for the purpose of facilitating peripheral circuit probing of the internal circuitry of the flip chip. The proposed method is characterized in the forming of a dual-layer NiV/Cu metallization structure, rather than a triple-layer Al/NiV/Cu metallization structure, over each aluminum-based PBP, which includes a bottom layer of nickel-vanadium (NiV) deposited over the aluminum-based PBP and an upper layer of copper (Cu) deposited over the nickel-vanadium layer. When low-resolution photolithographic and etching equipment is used for photoresist mask definition for selective removal of the NiV/Cu metallization structure, the resulted photoresist masking can be misaligned to the PBP.
    Type: Grant
    Filed: August 21, 2000
    Date of Patent: July 10, 2001
    Assignee: Siliconeware Precision Industries Co., Ltd.
    Inventors: Feng-Lung Chien, Randy H.Y. Lo, Chun-chi Ke