Patents Assigned to SILIKEN SA
  • METHODS AND APPARATUS FOR THE PRODUCTION OF HIGH PURITY SILICON
    Publication number: 20120148728
    Abstract: Methods and apparatus for the production of high purity silicon including a silicon deposition reactor with a gas distribution plate for injecting gas into the silicon deposition reactor.
    Type: Application
    Filed: December 9, 2010
    Publication date: June 14, 2012
    Applicant: SILIKEN SA
    Inventors: Manuel Vincente Vales Canle, Maria Tomas Martinez, Javier San-Segundo Sanchez