Abstract: A measuring device includes: a placement unit that places thereon a measurement object; an alignment microscope that observes an area including a measurement reference position of the measurement object placed on the placement unit; an capturing unit that captures an image of the area including the measurement reference position observed by the alignment microscope; a detection unit that detects the measurement reference position based on image data of the image captured by the capturing unit; a reference coordinate creating unit that creates a reference coordinate system based on the measurement reference position detected by the detection unit; a specifying unit that specifies a predetermined measurement position of the measurement object in the reference coordinate system created by the reference coordinate creating unit; and a measuring unit that measures at least one of surface roughness and surface shape of the predetermined measurement position of the measurement object specified by the specifying unit
Abstract: A measuring device includes: a placement unit that places thereon a measurement object; an alignment microscope that observes an area including a measurement reference position of the measurement object placed on the placement unit; an capturing unit that captures an image of the area including the measurement reference position observed by the alignment microscope; a detection unit that detects the measurement reference position based on image data of the image captured by the capturing unit; a reference coordinate creating unit that creates a reference coordinate system based on the measurement reference position detected by the detection unit; a specifying unit that specifies a predetermined measurement position of the measurement object in the reference coordinate system created by the reference coordinate creating unit; and a measuring unit that measures at least one of surface roughness and surface shape of the predetermined measurement position of the measurement object specified by the specifying unit