Patents Assigned to Siverta, Inc.
  • Single-pole double-throw MEMS switch
    Patent number: 7816999
    Abstract: MEMS switches of varying configurations provide individually acutatable contacts. The MEMS switches are sealed by an improved anodic bonding technique.
    Type: Grant
    Filed: April 12, 2005
    Date of Patent: October 19, 2010
    Assignee: Siverta, Inc.
    Inventors: Gary Joseph Pashby, Timothy G. Slater, Glenn Gottlieb
  • Sealed integral MEMS switch
    Patent number: 7123119
    Abstract: A MEMS switch includes a micro-machined monolithic layer (122) having, a seesaw (52), a pair of torsion bars (66a, 66b), and a frame (64). The frame (64) supports the seesaw (52) for rotation about an axis (68) established by the torsion bars (66a, 66b). Shorting bars (58a, 58b) at ends of the seesaw (52) connect across pairs of switch contacts (56a1, 56a2, 56b1, 56b2) carried on a substrate (174) bonded to one surface of the layer (122). A base (104) is also joined to a surface of the layer (122) opposite the substrate (174). The substrate (174) carries electrodes (54a, 54b) for applying forces to the seesaw (52) urging it to rotate about the axis (68). An electrical contact island (152) supported at a free end of a cantilever (166) ensures good electrical conduction between ground plates (162a, 162b) on the layer (122) and electrical conductors on the substrate (174).
    Type: Grant
    Filed: August 4, 2003
    Date of Patent: October 17, 2006
    Assignee: Siverta, Inc.
    Inventors: Gary Joseph Pashby, Timothy G. Slater