Patents Assigned to SK TRICHEM
  • Precursor solution for thin film deposition and thin film forming method using same
    Patent number: 11972941
    Abstract: Proposed is a precursor composition for forming a metal film including a zirconium compound represented by any one of Chemical Formulas 1 to 3 and a hafnium compound represented by any one of Chemical Formulas 4 to 6.
    Type: Grant
    Filed: December 6, 2019
    Date of Patent: April 30, 2024
    Assignee: SK TRICHEM
    Inventors: Chang Sung Hong, Yong Joo Park, Tae Hoon Oh, In Chun Hwang, Sang Kyung Lee, Dong Hyun Kim