Patents Assigned to SLT TECHNOLOGIES, INC.
  • Patent number: 11721549
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Grant
    Filed: February 10, 2021
    Date of Patent: August 8, 2023
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, Wenkan Jiang, Drew W. Cardwell, Dirk Ehrentraut
  • Patent number: 11705322
    Abstract: Embodiments of the present disclosure include techniques related to techniques for processing materials for manufacture of group-III metal nitride and gallium based substrates. More specifically, embodiments of the disclosure include techniques for growing large area substrates using a combination of processing techniques. Merely by way of example, the disclosure can be applied to growing crystals of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others for manufacture of bulk or patterned substrates. Such bulk or patterned substrates can be used for a variety of applications including optoelectronic and electronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photodetectors, integrated circuits, and transistors, and others.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: July 18, 2023
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Wenkan Jiang, Mark P. D'Evelyn, Derrick S. Kamber, Dirk Ehrentraut, Jonathan D. Cook, James Wenger
  • Patent number: 11047041
    Abstract: A process of preparing polycrystalline group III nitride chunks comprising the steps of (a) placing a group III metal inside a source chamber; (b) flowing a halogen-containing gas over the group III metal to form a group III metal halide; (c) contacting the group III metal halide with a nitrogen-containing gas in a deposition chamber containing a foil, the foil comprising at least one of Mo, W, Ta, Pd, Pt, Ir, or Re; (d) forming a polycrystalline group III nitride layer on the foil within the deposition chamber; (e) removing the polycrystalline group III nitride layer from the foil; and (f) comminuting the polycrystalline group III nitride layer to form the polycrystalline group III nitride chunks, wherein the removing and the comminuting are performed in any order or simultaneously.
    Type: Grant
    Filed: March 10, 2020
    Date of Patent: June 29, 2021
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Douglas W. Pocius, Derrick S. Kamber, Mark P. D'Evelyn, Jonathan D. Cook
  • Patent number: 10975492
    Abstract: A method for growing a crystalline composition, the first crystalline composition may include gallium and nitrogen. The crystalline composition may have an infrared absorption peak at about 3175 cm?1, with an absorbance per unit thickness of greater than about 0.01 cm?1. In one embodiment, the composition ay have an amount of oxygen present in a concentration of less than about 3×1018 per cubic centimeter, and may be free of two-dimensional planar boundary defects in a determined volume of the first crystalline composition.
    Type: Grant
    Filed: January 11, 2019
    Date of Patent: April 13, 2021
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark Philip D'Evelyn, Kristi Jean Narang, Dong-Sil Park, Huicong Hong, Xian-An Cao, Larry Qiang Zeng
  • Patent number: 10648102
    Abstract: Gallium-containing nitride crystals are disclosed, comprising: a top surface having a crystallographic orientation within about 5 degrees of a plane selected from a (0001) +c-plane and a (000-1) ?c-plane; a substantially wurtzite structure; n-type electronic properties; an impurity concentration of hydrogen greater than about 5×1017 cm?3; an impurity concentration of oxygen between about 2×1017 cm?3 and about 1×1020 cm?3; an [H]/[O] ratio of at least 0.3; an impurity concentration of at least one of Li, Na, K, Rb, Cs, Ca, F, and CI greater than about 1×1016 cm?3; a compensation ratio between about 1.0 and about 4.0; an absorbance per unit thickness of at least 0.
    Type: Grant
    Filed: January 9, 2018
    Date of Patent: May 12, 2020
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Wenkan Jiang, Dirk Ehrentraut, Mark P. D'Evelyn
  • Patent number: 10619239
    Abstract: A process of preparing polycrystalline group III nitride chunks comprising the steps of (a) placing a group III metal inside a source chamber; (b) flowing a halogen-containing gas over the group III metal to form a group III metal halide; (c) contacting the group III metal halide with a nitrogen-containing gas in a deposition chamber containing a foil, the foil comprising at least one of Mo, W, Ta, Pd, Pt, Ir, or Re; (d) forming a polycrystalline group III nitride layer on the foil within the deposition chamber; (e) removing the polycrystalline group III nitride layer from the foil; and (f) comminuting the polycrystalline group III nitride layer to form the polycrystalline group III nitride chunks, wherein the removing and the comminuting are performed in any order or simultaneously.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: April 14, 2020
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Douglas W. Pocius, Derrick S. Kamber, Mark P. D'Evelyn, Jonathan D. Cook
  • Patent number: 10604865
    Abstract: Methods for large-scale manufacturing of semipolar gallium nitride boules are disclosed. The disclosed methods comprise suspending large-area single crystal seed plates in a rack, placing the rack in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and growing crystals ammonothermally. A bi-faceted growth morphology may be maintained to facilitate fabrication of large area semipolar wafers without growing thick boules.
    Type: Grant
    Filed: June 26, 2018
    Date of Patent: March 31, 2020
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, Dirk Ehrentraut, Derrick S. Kamber, Bradley C. Downey
  • Patent number: 10301745
    Abstract: An ultralow defect gallium-containing nitride crystal and methods of making ultralow defect gallium-containing nitride crystals are disclosed. The crystals are useful as substrates for light emitting diodes, laser diodes, transistors, photodetectors, solar cells, and photoelectrochemical water splitting for hydrogen generators.
    Type: Grant
    Filed: August 2, 2016
    Date of Patent: May 28, 2019
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, Dirk Ehrentraut, Wenkan Jiang, Bradley C. Downey
  • Patent number: 10293318
    Abstract: A pressure release mechanism for use with a capsule for processing materials or growing crystals in supercritical fluids is disclosed. The capsule with the pressure release mechanism is scalable up to very large volumes and is cost effective according to a preferred embodiment. In conjunction with suitable high pressure apparatus, the capsule with pressure release mechanism is capable of processing materials at pressures and temperatures of 20-2000 MPa and 25-1500° C., respectively. Of course, there can be other variations, modifications, and alternatives.
    Type: Grant
    Filed: September 19, 2016
    Date of Patent: May 21, 2019
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark Philip D'Evelyn, Rajeev Tirumala Pakalapati
  • Patent number: 10174438
    Abstract: An apparatus for processing material at elevated pressure, the apparatus comprising: (a) two or more radial restraint structures defining an interior region configured to receive a processing chamber, the radial restraint structures being configured to resist an outward radial force from the interior region; (b) upper and lower crown members being disposed axially on either end of the interior region and configured to resist an outward axial force from the interior region; (c) a first axial restraint structure coupling the upper crown member and the lower crown member to provide axial restraint of the upper crown member and the lower crown; and (d) a second axial restraint structure compressing the two or more radial restraint structures to provide an axial restraint of the two or more radial restraint structures.
    Type: Grant
    Filed: March 30, 2017
    Date of Patent: January 8, 2019
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Rajeev Tirumala Pakalapati, Mark P. D'Evelyn
  • Patent number: 10145021
    Abstract: An apparatus for processing materials at high temperatures comprises a high strength enclosure; a plurality of high strength radial segments disposed adjacent to and radially inward from the high strength enclosure; a liner disposed adjacent to and radially inward from the radical segments; a chamber defined interior to the liner; a heating device disposed within the chamber; and a capsule disposed within the chamber, the capsule configured to hold a supercritical fluid. The apparatus may be used for growing crystals, e.g., GaN, under high temperature and pressure conditions.
    Type: Grant
    Filed: July 28, 2011
    Date of Patent: December 4, 2018
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Kirsh Afimiwala, Larry Zeng
  • Patent number: 10145026
    Abstract: Methods for large-scale manufacturing of semipolar gallium nitride boules are disclosed. The disclosed methods comprise suspending large-area single crystal seed plates in a rack, placing the rack in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and growing crystals ammonothermally. A bi-faceted growth morphology may be maintained to facilitate fabrication of large area semipolar wafers without growing thick boules.
    Type: Grant
    Filed: June 3, 2013
    Date of Patent: December 4, 2018
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, Dirk Ehrentraut, Derrick S. Kamber, Bradley C. Downey
  • Patent number: 10100425
    Abstract: A large area nitride crystal, comprising gallium and nitrogen, with a non-polar or semi-polar large-area face, is disclosed, along with a method of manufacture. The crystal is useful as a substrate for a light emitting diode, a laser diode, a transistor, a photodetector, a solar cell, or for photoelectrochemical water splitting for hydrogen generation.
    Type: Grant
    Filed: November 2, 2015
    Date of Patent: October 16, 2018
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, James S. Speck
  • Patent number: 10094017
    Abstract: A process of preparing polycrystalline group III nitride chunks comprising the steps of (a) placing a group III metal inside a source chamber; (b) flowing a halogen-containing gas over the group III metal to form a group III metal halide; (c) contacting the group III metal halide with a nitrogen-containing gas in a deposition chamber containing a foil, the foil comprising at least one of Mo, W, Ta, Pd, Pt, Ir, or Re; (d) forming a polycrystalline group III nitride layer on the foil within the deposition chamber; (e) removing the polycrystalline group III nitride layer from the foil; and (f) comminuting the polycrystalline group III nitride layer to form the polycrystalline group III nitride chunks, wherein the removing and the comminuting are performed in any order or simultaneously.
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: October 9, 2018
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Douglas W. Pocius, Derrick S. Kamber, Mark P. D'Evelyn, Jonathan D. Cook
  • Patent number: 10087550
    Abstract: Techniques for processing materials for manufacture of gallium-containing nitride substrates are disclosed. More specifically, techniques for fabricating and reusing large area substrates using a combination of processing techniques are disclosed. The methods can be applied to fabricating substrates of GaN, AlN, InN, InGaN, AlGaN, and AlInGaN, and others. Such substrates can be used for a variety of applications including optoelectronic devices, lasers, light emitting diodes, solar cells, photo electrochemical water splitting and hydrogen generation, photo detectors, integrated circuits, transistors, and others.
    Type: Grant
    Filed: May 16, 2017
    Date of Patent: October 2, 2018
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, Michael Ragan Krames
  • Patent number: 10036099
    Abstract: Large-scale manufacturing of gallium nitride boules using m-plane or wedge-shaped seed crystals can be accomplished using ammonothermal growth methods. Large-area single crystal seed plates are suspended in a rack, placed in a large diameter autoclave or internally-heated high pressure apparatus along with ammonia and a mineralizer, and crystals are grown ammonothermally. The orientation of the m-plane or wedge-shaped seed crystals are chosen to provide efficient utilization of the seed plates and of the volume inside the autoclave or high pressure apparatus.
    Type: Grant
    Filed: January 16, 2015
    Date of Patent: July 31, 2018
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Mark P. D'Evelyn, Dirk Ehrentraut, Derrick S. Kamber, Bradley C. Downey
  • Patent number: 10029955
    Abstract: An improved capsule and method of use for processing materials or growing crystals in supercritical fluids is disclosed. The capsule is scalable up to very large volumes and provides for cost-effective processing. In conjunction with suitable high pressure apparatus, the capsule is capable of processing materials at pressures and temperatures of up to approximately 8 GPa and 1500° C., respectively.
    Type: Grant
    Filed: October 22, 2012
    Date of Patent: July 24, 2018
    Assignee: SLT TECHNOLOGIES, INC.
    Inventors: Pakalapati Tirumala Rajeev, Douglas Wayne Pocius, Derrick S. Kamber, Michael Coulter