Abstract: A drive system for driving a chuck device includes a controller and a switching valve, which is a 5-port servo valve, switching the state of supply of compressed air to the chuck device based on a valve command signal from the controller. During switching of first and second fingers from a closed position to an open position, when the axial position of a piston reaches a switch point, which is a predetermined distance short of a target position corresponding to a freely selected intermediate position of the first and second fingers, the switching valve is opened at a third opening for a predetermined period and then switched to be opened at a fourth opening so that supply and discharge of compressed air are stopped. As a result, the first and second fingers stop in the intermediate position.

Abstract: A hydraulic fluid cylinder is equipped with a cylinder tube, a piston unit, and a piston rod. The piston unit has a piston body comprising a plurality of members and provided with a gasket-mounting groove. The piston body has a first piston member and a second piston member which are layered in the axial direction. The gasket-mounting groove is formed from a combination of at least two members. A thin section exhibiting depth in the axial direction is provided in the first piston member and/or the second piston member.

Abstract: When a fluid is supplied to a first pressure-boosting chamber and/or a second pressure-boosting chamber of a pressure booster, either a first electromagnetic valve unit supplies a fluid discharged from a first pressurizing chamber to a second pressurizing chamber, or a second electromagnetic valve unit supplies a fluid discharged from a third pressurizing chamber to a fourth pressurizing chamber.

Abstract: A suction device includes an adapter having a supply passage to which a negative pressure fluid is supplied, a bellows connected to a lower end of the adapter, and a pad member formed at the distal end of the bellows. The pad member has plural first and second ribs on a suction surface that attracts a workpiece under suction. The first ribs are disposed on an outer circumferential side of an attachment provided in the center of the pad member and extend toward the outer circumferential side. The second ribs are provided on an outer circumferential side of the first ribs, and are disposed in a circumferentially offset manner with respect to the first ribs. Additionally, between the respective first ribs which are disposed alongside one another in the circumferential direction of a skirt, supply paths are formed to which the negative pressure fluid is supplied from the attachment.

Abstract: A workpiece gripping device includes a gripping member and a holding member. The gripping member includes a pair of extension parts that protrude from a base part and face each other with a space therebetween where the plate-shaped part of the workpiece can be inserted, and is deformable so that at least parts of the extension parts approach each other or are separated from each other. The holding member includes a slit for holding the gripping member slidably along a direction in the extension parts protrude, can make the extension parts approach each other by housing at least parts of the extension parts in the slit, and can make the extension parts be separated from each other by projecting at least parts of the extension parts from the slit.

Abstract: An air cylinder fluid circuit is formed by connecting a switching valve, which switches the supply and discharge of compressed air, and cylinder port parts of an air cylinder by means of pipes, wherein the acoustic velocity conductance of the pipes is smaller than the acoustic velocity conductance of the switching valve and the cylinder port parts.

Abstract: A clamping device has a clamp arm pivotally housed inside a body, and a locating section for positioning workpieces is provided on an upper portion of the body. The locating section is formed with a slit hole which enables a claw portion of the clamp arm to protrude outside, and is provided inside with a shutter facing the slit hole and being movable. The claw portion of the clamp arm is inserted through a clamp hole of the shutter. Then, when the clamp arm moves inside the body in the axial direction and rotates, the shutter moves integrally with the clamp arm in the axial direction to cover the slit hole. Thus, the opening portion of the slit hole is suitably covered except that portion occupied by the claw portion so that foreign matter and the like can be prevented from entering the locating section through the slit hole.

Abstract: An integrated multiple valve manifold that is reduced in size and weight by integrally incorporating a plurality of valve mechanisms in one manifold. The one manifold, which is formed of an extruded material through which a fluid supply hole and fluid discharge holes extend, includes a plurality of valve holes each of which communicates with the fluid supply hole and the fluid discharge holes by directly intersecting both of the fluid supply hole and the fluid discharge holes, output ports that are formed so as to individually communicate with the valve holes, spools that are slidably inserted into the valve holes, and electromagnetic pilot valves that are individually attached to one ends or both ends of the valve holes.

Abstract: A clamp device is provided with a detection section which detects the pivotal position of a clamp arm. The detection section has: a cam section which is provided on a pivot shaft, includes a predetermined cam surface, and is formed so that the radial distance from the center of the pivot shaft to the cam surface varies circumferentially; and a proximity sensor which detects the position of the cam surface which varies as the pivot shaft pivots.

Abstract: In a temperature control apparatus for controlling the temperature of a load by supplying high-temperature circulating liquid to the load, a device in which a helical channel portion of a first heat exchange channel through which circulating liquid flows is housed in a second heat exchange channel formed of a channel space in a hollow shell through which coolant flows is used as a heat exchanger for cooling the circulating liquid, cylindrical members are individually fitted on an inflow channel portion and an outflow channel portion connected to opposite ends of the helical channel portion of the first heat exchange channel, and the cylindrical members are each fixed to the shell of the heat exchanger with a weld.