Abstract: The present disclosure relates to the technical field of semiconductor processes, and discloses a semiconductor device and a manufacturing method therefor.
Type:
Application
Filed:
October 3, 2017
Publication date:
April 19, 2018
Applicants:
Semiconductor Manufacturing International (Shanghai) Corporation, SMIC Advanced Technology Research & Development (Shanghai) Corporation, IMEC International
Inventors:
Hai Zhao, Yang Liu, Gang Mao, Cheng-Jui Yang, Yongmeng Lee, Shaofeng Yu