Abstract: A turbomolecular vacuum pump has a housing, a vertically oriented hollow pump rotor situated in the housing, and a vertically upwardly oriented stub shaft affixed to the housing and extending into the hollow pump rotor. The pump rotor is supported on the stub shaft by a magnetic axial bearing and at least one magnetic radial bearing, all disposed in the space surrounded by the hollow pump rotor.
Type:
Grant
Filed:
September 26, 1974
Date of Patent:
May 17, 1977
Assignees:
Leybold-Heraeus GmbH & Co. KG, Societe de Propulsion-S.E.P.
Inventors:
Werner Bachler, Rudiger Frank, Helmut Habermann, Maurice Brunet