Abstract: A device for producing a gas plasma by ionisation of a gas using a microwave source of determined nominal power (Pn), includes a magnetron 7 receiving its electric energy from a supply circuit. The device is characterized in that the power (Pd) delivered by the supply circuit to the magnetron 7 is no more than one quarter of the nominal power (Pn) of the magnetron 7.
Type:
Application
Filed:
December 21, 2005
Publication date:
February 5, 2009
Applicant:
SOCIETE POUR LA CONDEPTIONS DES APPLICATIONS DES TECHNIQUES ELECTRONIQUES-SATEL
Inventors:
Pascal Regere, Andre Ricard, Sarah Cousty