Abstract: Construction of a micro-thermocouple sensor designed to be incorporated in a mass flow meter for the circulation of gaseous fluids, includes of the following steps: depositing an insulating layer of several microns by electron gun on the sensor tube, then depositing the components of the thermocouple, by the electron gun, through the nickel masks, at a residual pressure lower than 10−6 torr, at a thickness of several thousand Angstroms, annealing of the capillary tube for one hour, then the mounting of a heating element on the capillary tube treated in this manner.

Abstract: The process for the construction of a micro-thermocouple sensor designed to be incorporated in a mass flow meter for the circulation of gaseous fluids, including of the following steps:

Abstract: The sensor (7) for a mass flow meter (1) including a capillary tube (6) for circulation of fluid in parallel with the principal circuit of the fluid circulation. The sensor includes heating mechanisms (20) of the capillary tube (6) and mechanisms for measuring the temperature (22, 23), upstream and downstream from this heating mechanism (20), and separate from the heating mechanism. The mechanisms for measuring the temperature (22, 23) are two resistors manufactured by deposition in an external manner on the sensor tube (6), one of them (22) upstream from the heating mechanism (20), the other (23) downstream from the heating mechanism. The manufacturing process includes stages of deposition by an electron gun, firstly of a layer of zirconia (21) of several microns, on the tube (6) made of stainless steel, then of the sensitive components (27) and the contacts (31, 32) of the measurement resistors (22, 23), made of platinum, and defined by masks of nickel.

Abstract: A fluid circuit sealing apparatus having a valve body with a valve base having a fluid inlet pipe and a fluid discharge pipe extending therethrough, a diaphragm having a cup shape, and a piston engageable with the diaphragm so as to deform the diaphragm so as to rest upon a seat provided on a rim of the inlet pipe. The diaphragm is clamped on an edge thereof between the valve body and the clamping cover. The diaphragm has a raised circumferential rim which forms an angle with a bottom of the diaphragm. The diaphragm has a parabolic dome. The raised circumferential rim has a circular upward fold portion extending to a slanting annular portion. The slanting annular portion is connected to the parabolic dome by a circular fold. The circular fold extends around a periphery of the parabolic dome.