Patents Assigned to SOLAR-SEMI GMBH
  • Substrate plate
    Patent number: 10130971
    Abstract: A device for lacquering or coating a substrate is disclosed. The device includes a substrate plate configured to accommodate said substrate, and one or more suction points connected to, and extending upwardly from, the substrate plate. The one or more suction points may be configured to provide a vacuum to said substrate.
    Type: Grant
    Filed: January 3, 2013
    Date of Patent: November 20, 2018
    Assignee: solar-semi GmbH
    Inventor: Pirmin Muffler
  • Device for machining a substrate and a method for this purpose
    Patent number: 9431284
    Abstract: In a device for machining, in particular etching and/or developing, substrates, in particular wafers, in particular etching and/or developing, having a turntable, the turntable has a Venturi gap.
    Type: Grant
    Filed: March 11, 2015
    Date of Patent: August 30, 2016
    Assignee: solar-semi GmbH
    Inventor: Pirmin Muffler
  • Device for machining a substrate and a method for this purpose
    Patent number: 9004497
    Abstract: In a device for machining, in particular etching and/or developing, substrates, in particular wafers, in particular etching and/or developing, having a turntable, the turntable has a Venturi gap.
    Type: Grant
    Filed: November 30, 2012
    Date of Patent: April 14, 2015
    Assignee: solar-semi GmbH
    Inventor: Pirmin Muffler
  • SUBSTRATE PLATE
    Publication number: 20130189439
    Abstract: A device for lacquering or coating a substrate is disclosed. The device includes a substrate plate configured to accommodate said substrate, and one or more suction points connected to, and extending upwardly from, the substrate plate. The one or more suction points may be configured to provide a vacuum to said substrate.
    Type: Application
    Filed: January 3, 2013
    Publication date: July 25, 2013
    Applicant: solar-semi GmbH
    Inventor: solar-semi GmbH
  • DEVICE FOR MACHINING A SUBSTRATE AND A METHOD FOR THIS PURPOSE
    Publication number: 20130140274
    Abstract: In a device for machining, in particular etching and/or developing, substrates, in particular wafers, in particular etching and/or developing, having a turntable, the turntable has a Venturi gap.
    Type: Application
    Filed: November 30, 2012
    Publication date: June 6, 2013
    Applicant: SOLAR-SEMI GMBH
    Inventor: Solar-semi GmbH