Patents Assigned to Solarate Ltd
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Publication number: 20140251420Abstract: A photovoltaic device includes a substrate; a back contact layer disposed above the substrate; an absorber layer for photon absorption disposed above the back contact layer; a buffer layer disposed above the absorber layer; a conductive coating disposed above the buffer layer; and a transparent conductive layer disposed over the conductive coating. The conductive coating includes at least one type of nanomaterial, which has at least one dimension in the range of from 0.5 nm to 1000 nm.Type: ApplicationFiled: March 11, 2013Publication date: September 11, 2014Applicant: TSMC SOLAR LTD.Inventor: Shih-Wei Chen
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Publication number: 20140246093Abstract: A method of fabricating a buffer layer of a photovoltaic device comprises: providing a substrate having a back contact layer disposed above the substrate and an absorber layer disposed above the back contact layer; depositing a metal layer on the absorber layer; and performing a thermal treatment on the deposited metal layer in an atmosphere comprising sulfur, selenium or oxygen, to form a buffer layer.Type: ApplicationFiled: March 1, 2013Publication date: September 4, 2014Applicant: TSMC SOLAR LTD.Inventor: Shih-Wei CHEN
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Publication number: 20140206132Abstract: A solar cell includes an absorber layer formed of a CIGAS, copper, indium, gallium, aluminum, and selenium. A method for forming the absorber layer provides for using an indium-aluminum target and depositing an aluminum-indium film as a metal precursor layer using sputter deposition. Additional metal precursor layers such as a CuGa layer are also provided and a thermal processing operation causes the selenization of the metal precursor layers. The thermal processing operation/selenization operation converts the metal precursor layers to an absorber layer. In some embodiments, the absorber layer includes a double graded chalcopyrite-based bandgap.Type: ApplicationFiled: March 19, 2014Publication date: July 24, 2014Applicant: TSMC SOLAR LTD.Inventors: Wen-Tsai YEN, Chung-Hsien WU, Shih-Wei CHEN, Wen-Chin LEE
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Patent number: 8785235Abstract: A method and apparatus for forming a solar cell. The apparatus includes a housing defining a vacuum chamber and a rotatable substrate apparatus configured to hold a plurality of substrates on a plurality of surfaces wherein each of the plurality of surfaces are disposed facing an interior surface of the vacuum chamber. A first sputtering source is configured to deposit a plurality of absorber layer atoms of a first type over at least a portion of a surface of each one of the plurality of substrates. An evaporation source is disposed in a first subchamber of the vacuum chamber and configured to deposit a plurality of absorber layer atoms of a second type over at least a portion of the surface of each one of the plurality of substrates. A first isolation source is configured to isolate the evaporation source from the first sputtering source.Type: GrantFiled: June 1, 2012Date of Patent: July 22, 2014Assignee: TSMC Solar Ltd.Inventors: Edward Teng, Ying-Chen Chao, Chih-Jen Yang, Kuo-Jui Hsiao
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Publication number: 20140193939Abstract: An apparatus for forming a solar cell includes a housing defining a vacuum chamber, a rotatable substrate support, at least one inner heater and at least one outer heater. The substrate support is inside the vacuum chamber configured to hold a substrate. The at least one inner heater is between a center of the vacuum chamber and the substrate support, and is configured to heat a back surface of a substrate on the substrate support. The at least one outer heater is between an outer surface of the vacuum chamber and the substrate support, and is configured to heat a front surface of a substrate on the substrate support.Type: ApplicationFiled: January 4, 2013Publication date: July 10, 2014Applicant: TSMC SOLAR LTD.Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG
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Publication number: 20140186992Abstract: A removable cover system for protecting solar cells from exposure to moisture during fabrication processes. The cover system includes a cover having a configuration that complements the configuration of a solar cell substrate to be processed in an apparatus where moisture is present. A resiliently deformable seal member attached to the cover is positionable with the cover to engage and seal the top surface of the substrate. In one embodiment, the cover is dimensioned and arranged so that the seal member engages the peripheral angled edges and corners of the substrate for preventing the ingress of moisture beneath the cover. An apparatus for fabricating a solar cell using the cover and associated method are also disclosed.Type: ApplicationFiled: March 5, 2014Publication date: July 3, 2014Applicant: TSMC Solar Ltd.Inventors: Chih-Wei HUANG, Keng-Hsin CHI, Chien-Nan LIN, Hua-Tso WEI
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Publication number: 20140170804Abstract: A method and system provide for depositing a TCO, transparent conductive oxide, film in one chamber of a manufacturing tool then irradiating the TCO film with light energy in another chamber of the same tool. The TCO film is used in a solar cell and formed on a solar cell substrate in some embodiments. The method includes irradiating the TCO film for a time and energy to reduce resistance of the TCO film without reducing transmittance. One or multiple light sources are used in the light irradiation chamber. Light in the infrared range, visible light range and ultraviolet light range are used either individually or in combination.Type: ApplicationFiled: December 14, 2012Publication date: June 19, 2014Applicant: TSMC SOLAR LTD.Inventors: Yung-Sheng CHIU, Chun-Heng CHEN, Tzu-Huan CHENG, Chien-Yao HUANG
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Publication number: 20140159752Abstract: A method and apparatus for measuring thickness of a film in a solar cell provides for directing light emitted at multiple emission wavelengths, to a surface of the solar cell. Each emission results in the generation of a responsive photo current. The photo currents are read by a current meter having one contact coupled to a surface of the solar cell and another contact coupled to another surface. The currents associated with each of the different light emissions are identified and the thickness of a film in the solar cell is calculated based on the two currents or associated quantum efficiencies, and associated absorption coefficients. In one embodiment, the film thickness is the thickness of a CdS or other buffer film in a thin film solar cell.Type: ApplicationFiled: December 7, 2012Publication date: June 12, 2014Applicant: TSMC SOLAR LTD.Inventors: Ming-Tien TSAI, Tzu-Huan CHENG
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Patent number: 8748217Abstract: A method for manufacturing a thin film solar cell device includes forming a back contact layer on a substrate, forming an CIGS absorber layer on the back contact layer, treating the CIGS absorber layer with a metal-based alkaline solution, and forming a buffer layer on the CIGS absorber layer where the treatment of the CIGS absorber layer improves the adhesion between the CIGS absorber layer and the buffer layer and also improves the quality of the p-n junction at the CIGS absorber layer/buffer layer interface.Type: GrantFiled: November 13, 2012Date of Patent: June 10, 2014Assignee: TSMC Solar Ltd.Inventors: Chih-Ching Lin, Yong-Ping Chan, Kai-Yu Tung, Cheng-Tao Lee
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Publication number: 20140144769Abstract: A sputtering apparatus comprises a chamber configured to contain at least one sputter target and at least one substrate to be coated. The chamber has at least one adjustable shielding member defining an adjustable aperture. The member is positioned between the at least one sputter target and the at least one substrate. The aperture is adjustable in at least one of the group consisting of area and shape.Type: ApplicationFiled: November 29, 2012Publication date: May 29, 2014Applicant: TSMC SOLAR LTD.Inventors: Wen-Tsai YEN, Chung-Hsien WU, Shih-Wei CHEN, Ying-Hsin WU, Jui-Fu HSUEH, Kuan-Chu CHEN
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Publication number: 20140131198Abstract: Apparatuses for forming material films on a solar cell substrate of substantially uniform thickness and processes for forming the same are disclosed. The process performed in the apparatuses is physical vapor deposition (PVD) in some embodiments. In one embodiment, an apparatus includes a specially configured flow aperture. In another embodiment, an apparatus includes moveable shutters which open and close in synchronization with a rotating drum on which substrates are mounted for processing. In other embodiments, the apparatus includes a variable power supply or drum speed control which automatically vary the power supply to the apparatus or drum speed respectively in synchronization with the rotating drum.Type: ApplicationFiled: November 9, 2012Publication date: May 15, 2014Applicant: TSMC SOLAR LTD.Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG
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Publication number: 20140130856Abstract: A solar cell with a molybdenum back electrode layer and a molybdenum selenide ohmic contact layer over the molybdenum back electrode, is provided. The molybdenum selenide layer includes an accurately controlled thickness. A distinct interface exists between the molybdenum back electrode layer and the molybdenum silicide layer. The molybdenum silicide layer is produced by forming a molybdenum layer or a molybdenum nitride layer or a molybdenum oxide layer over an initially formed molybdenum layer such that an interface exists between the two layers. A selenization and sulfurization process is carried out to selectively convert the molybdenum-containing layer to molybdenum selenide but not the original molybdenum back electrode layer which remains as a molybdenum layer.Type: ApplicationFiled: November 15, 2012Publication date: May 15, 2014Applicant: TSMC SOLAR LTD.Inventors: Shih-Wei CHEN, Wen-Chin LEE, Wen-Tsai YEN, Chung-Hsien WU, Kuan-Chu CHEN
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Publication number: 20140131193Abstract: Apparatus for forming a solar cell comprises a housing defining a chamber including a substrate support. A sputtering source is configured to deposit particles of a first type over at least a portion of a surface of a substrate on the substrate support. An evaporation source is configured to deposit a plurality of particles of a second type over the portion of the surface of the substrate. A cooling unit is provided between the sputtering source and the evaporation source. A control system is provided for controlling the evaporation source based on a rate of mass flux emitted by the evaporation source.Type: ApplicationFiled: November 9, 2012Publication date: May 15, 2014Applicant: TSMC Solar Ltd.Inventors: Edward TENG, Ying-Chen CHAO, Chih-Jen YANG
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Publication number: 20140134784Abstract: A method for manufacturing a thin film solar cell device includes forming a back contact layer on a substrate, forming an CIGS absorber layer on the back contact layer, treating the CIGS absorber layer with a metal-based alkaline solution, and forming a buffer layer on the CIGS absorber layer where the treatment of the CIGS absorber layer improves the adhesion between the CIGS absorber layer and the buffer layer and also improves the quality of the p-n junction at the CIGS absorber layer/buffer layer interface.Type: ApplicationFiled: November 13, 2012Publication date: May 15, 2014Applicant: TSMC SOLAR LTD.Inventors: Chih-Ching LIN, Yong-Ping CHAN, Kai-Yu TUNG, Cheng-Tao LEE
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Publication number: 20140109958Abstract: A method of fabricating a photovoltaic device includes forming an absorber layer for photon absorption over a substrate, forming a buffer layer above the absorber layer, wherein both the absorber layer and the buffer layer are semiconductors, and forming a layer of intrinsic zinc oxide above the buffer layer through a hydrothermal reaction in a solution of a zinc-containing salt and an alkaline chemical.Type: ApplicationFiled: October 18, 2012Publication date: April 24, 2014Applicant: TSMC SOLAR LTD.Inventors: Shih-Wei CHEN, Wei-Lun XU, Wen-Tsai YEN, Chung-Hsien WU, Wen-Chin LEE
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Patent number: 8703524Abstract: A solar cell includes an absorber layer formed of a CIGAS, copper, indium, gallium, aluminum, and selenium. A method for forming the absorber layer provides for using an indium-aluminum target and depositing an aluminum-indium film as a metal precursor layer using sputter deposition. Additional metal precursor layers such as a CuGa layer are also provided and a thermal processing operation causes the selenization of the metal precursor layers. The thermal processing operation/selenization operation converts the metal precursor layers to an absorber layer. In some embodiments, the absorber layer includes a double graded chalcopyrite-based bandgap.Type: GrantFiled: November 29, 2012Date of Patent: April 22, 2014Assignee: TSMC Solar Ltd.Inventors: Wen-Tsai Yen, Chung-Hsien Wu, Shih-Wei Chen, Wen-Chin Lee
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Patent number: 8697478Abstract: A removable cover system for protecting solar cells from exposure to moisture during fabrication processes. The cover system includes a cover having a configuration that complements the configuration of a solar cell substrate to be processed in an apparatus where moisture is present. A resiliently deformable seal member attached to the cover is positionable with the cover to engage and seal the top surface of the substrate. In one embodiment, the cover is dimensioned and arranged so that the seal member engages the peripheral angled edges and corners of the substrate for preventing the ingress of moisture beneath the cover. An apparatus for fabricating a solar cell using the cover and associated method are also disclosed.Type: GrantFiled: September 6, 2012Date of Patent: April 15, 2014Assignee: TSMC Solar Ltd.Inventors: Chih-Wei Huang, Keng-Hsin Chi, Chien-Nan Lin, Hua-Tso Wei
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Publication number: 20140076392Abstract: A thin film solar cell and process for forming the same. The solar cell includes a bottom electrode layer, semiconductor light absorbing layer, and a TCO top electrode layer. In one embodiment, a TCO seed layer is formed between the top electrode and absorber layers to improve adhesion of the top electrode layer to the absorber layer. In one embodiment, the seed layer is formed at a lower temperature than the TCO top electrode layer and has a different microstructure.Type: ApplicationFiled: September 18, 2012Publication date: March 20, 2014Applicant: TSMC SOLAR LTD.Inventors: Chih Ching LIN, Yong-Ping CHAN, Wei-Chun HSU, Chen-Yun WANG
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Publication number: 20140065758Abstract: A removable cover system for protecting solar cells from exposure to moisture during fabrication processes. The cover system includes a cover having a configuration that complements the configuration of a solar cell substrate to be processed in an apparatus where moisture is present. A resiliently deformable seal member attached to the cover is positionable with the cover to engage and seal the top surface of the substrate. In one embodiment, the cover is dimensioned and arranged so that the seal member engages the peripheral angled edges and corners of the substrate for preventing the ingress of moisture beneath the cover. An apparatus for fabricating a solar cell using the cover and associated method are also disclosed.Type: ApplicationFiled: September 6, 2012Publication date: March 6, 2014Applicant: TSMC SOLAR, LTD.Inventors: Chih-Wei HUANG, Keng-Hsin CHI, Chien-Nan LIN, Hua-Tso WEI
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Publication number: 20130269778Abstract: A method for manufacturing a CIGS thin film photovoltaic device includes forming a back contact layer on a substrate, forming an Se-rich layer on the back contact layer, forming a precursor layer on the Se-rich layer by depositing copper, gallium and indium resulting in a first interim structure, annealing or selenizing the first interim structure, thereby forming Cu/Se, Ga/Se or CIGS compounds along the interface between the back contact layer and the precursor layer and resulting in a second interim structure, and selenizing the second interim structure, thereby converting the precursor layer into a CIGS absorber layer on the back contact layer.Type: ApplicationFiled: April 13, 2012Publication date: October 17, 2013Applicant: TSMC SOLAR LTD.Inventors: Hsuan-Sheng YANG, Wen-Chin LEE, Li-Huan ZHU