Abstract: A method for casting a reactive material PVD target, as well as targets thus obtained and a mold for casting. The method includes providing a mold defining an opening, placing a reactive material ingot in to a reservoir (140) proximate the mold, forming a vacuum and melting the reactive material in the reservoir, heating the mold to above a casting temperature and forming a vacuum therein, introducing molten reactive material from the reservoir into the opening and cooling the mold to form the PVD target.
Type:
Grant
Filed:
June 27, 2012
Date of Patent:
November 27, 2018
Assignee:
SOLERAS, LTD.
Inventors:
Dean T. Plaisted, Michael Asbas, Lawrence C. Ferrin, Paul G. Carter, Guy P. Laverriere
Abstract: A method for casting a reactive material PVD target, as well as targets thus obtained and a mold for casting. The method includes providing a mold defining an opening, placing a reactive material ingot in to a reservoir (140) proximate the mold, forming a vacuum and melting the reactive material in the reservoir, heating the mold to above a casting temperature and forming a vacuum therein, introducing molten reactive material from the reservoir into the opening and cooling the mold to form the PVD target.
Type:
Application
Filed:
June 27, 2012
Publication date:
July 24, 2014
Applicant:
Soleras, Ltd.
Inventors:
Dean T. Plaisted, Michael Asbas, Lawrence C. Ferrin, Paul G. Carter, Guy P. Laverriere
Abstract: The process that is the subject of this invention is a method of making a rotary sputtering target having the steps of providing a cylinder of sputtering target material having an adhesion-wetting layer on its inside surface; providing a stainless steel sputtering target backing tube having an outside diameter smaller than the sputtering target material inside diameter, the backing tube having an adhesion-wetting layer on its outside surface; welding an upper and lower stainless steel retaining ring to the backing tube adjacent to the sputtering target material so that the target material is in compression and the backing tube in tension; and introducing molten bonding material into the annulus between the backing tube and the sputtering target material.
Type:
Application
Filed:
March 21, 2011
Publication date:
July 14, 2011
Applicant:
SOLERAS, LTD.
Inventors:
Al Nolette, Paul Carter, Dean Plaisted, Alan Plaisted
Abstract: The process that is the subject of this invention is a method of making a rotary sputtering target having the steps of providing a cylinder of sputtering target material having an adhesion-wetting layer on its inside surface; providing a stainless steel sputtering target backing tube having an outside diameter smaller than the sputtering target material inside diameter, the backing tube having an adhesion-wetting layer on its outside surface; welding an upper and lower stainless steel retaining ring to the backing tube adjacent to the sputtering target material so that the target material is in compression and the backing tube in tension; and introducing molten bonding material into the annulus between the backing tube and the sputtering target material.
Type:
Grant
Filed:
September 21, 2006
Date of Patent:
April 12, 2011
Assignee:
Soleras, LTd.
Inventors:
Al Nolette, Paul Carter, Dean Plaisted, Alan Plaisted
Abstract: A sputtering cathode apparatus having a hollow cylindrical sputter target that is fixed or rotatable about its central axis and an internal magnet assembly that is rotated axially within the sputter target.
Abstract: The process that is the subject of this invention is a method of making a rotary sputtering target having the steps of providing a cylinder of sputtering target material having an adhesion-wetting layer on its inside surface; providing a stainless steel sputtering target backing tube having an outside diameter smaller than the sputtering target material inside diameter, the backing tube having an adhesion-wetting layer on its outside surface; welding an upper and lower stainless steel retaining ring to the backing tube adjacent to the sputtering target material so that the target material is in compression and the backing tube in tension; and introducing molten bonding material into the annulus between the backing tube and the sputtering target material.
Type:
Application
Filed:
September 21, 2006
Publication date:
March 22, 2007
Applicant:
Soleras Ltd.
Inventors:
Al Nolette, Paul Carter, Dean Plaisted, Alan Plaisted