Patents Assigned to Solid State Equipment Corporation
  • Wafer scrubbing device
    Patent number: RE36767
    Abstract: A wafer scrubbing device for cleaning the surfaces of a thin disk disposed on a stationary spin chuck employs a double brush arrangement whereby brush rotation induces rotation of the disk to be cleaned and whereby the speed differential between the constant rotational speed of the brushes and the .[.variable.]. rotational speed of the disk due to the relative position of the brushes on the disk causes the scrubbing of both surfaces and the edge of the disk.
    Type: Grant
    Filed: February 23, 1999
    Date of Patent: July 11, 2000
    Assignee: Solid State Equipment Corporation
    Inventor: Herman Itzkowitz