Abstract: The invention relates to a laser deposition device, comprising at least one target, a substrate arranged opposite of the at least one target and a laser for generating a laser beam, which beam is directed on the target, such that a plasma plume of target material is generated and is deposited onto the substrate, further comprising a base frame, a rotatable target frame with at least two target holders arranged in the base frame and at least one cooling device arranged to the base frame, which cooling device can be moved relative to the target frame to bring the cooling device in heat exchanging contact with the target frame.
Type:
Application
Filed:
June 23, 2010
Publication date:
June 28, 2012
Applicant:
SOLMATES B.V.
Inventors:
Joska Johannes Broekmaat, Jan Arnaud Janssens, Jan Matthijn Dekkers
Abstract: The invention relates to a device for pulsed laser deposition, which device comprises: a substrate mount with a substrate mounted thereon; a target mount with a target material mounted thereon and opposite of the substrate mount; a laser device for directing a laser beam on the target material; and a shadow mask arranged over the substrate; wherein the shadow mask is arranged in a movable disc, which movable disc is movable in axial direction to and from the substrate mount. The invention also relates to a method for operating such a device.
Type:
Application
Filed:
April 14, 2010
Publication date:
May 17, 2012
Applicant:
SOLMATES B.V.
Inventors:
Joska Johannes Broekmaat, Jan Matthijn Dekkers, Jan Arnaud Janssens
Abstract: The invention relates to a device for projecting an image on a surface, comprising: a light source generating a light beam; a mask arranged in the path of the light beam; a lens arranged behind the mask to focus the image of the mask on a surface, wherein the surface is not parallel to the lens, wherein at substantially each position along the edges of the mask the distance v to the lens and the distance b of the corresponding position at the edges of the image of the mask to the lens correspond substantially to the formula 1/v+1/b=1/f, wherein f is the focal length of the lengths. The invention also relates to a device for moving the image on the surface.
Type:
Application
Filed:
December 22, 2009
Publication date:
December 1, 2011
Applicant:
SOLMATES B.V.
Inventors:
Joska Johannes Broekmaat, Jan Matthijn Dekkers, Jan Arnaud Janssens
Abstract: The invention relates to a method for depositing a material for a target onto a surface of a sample, which method comprises the steps of: irradiating a surface of the target with a laser or electron beam to generate a plume of target material particles; positioning the sample near the plume, such that the target material particles are deposited onto the surface of the sample; rotating the sample around a rotation axis being perpendicular to the surface of the sample onto which the particles are deposited; moving the laser beam along the surface of the target, such that the plume moves in a radial direction in relation to the rotation axis; pulsing the laser beam at a variable frequency.
Type:
Application
Filed:
August 24, 2009
Publication date:
September 29, 2011
Applicant:
SOLMATES B.V.
Inventors:
Jan Arnaud Janssens, Gerard Cornelis Van Den Eijkel, Jan Matthijn Dekkers, Joska Johannes Broekmaat, Paul Te Riele