Abstract: A prosthetic device which includes a biocompatible carbon film firmly adherent to a substrate. The carbon preferably is turbostratic and is preferably very thin, e.g., less than about one micron. The thin carbon biocompatible film is dense and covers at least that portion of the substrate which will be in contact with body tissue and/or fluids to insure against physiological rejection and degradation of the prosthetic device. The carbon can be deposited on a variety of substrates, including low temperature substrates, in situ, without adversely affecting the mechanical properties of the substrate. The prosthetic device of the invention is formed by triode sputtering vacuum deposition at a relatively low temperature to achieve the desired results with respect to the deposited carbon and the substrate and with respect to the required adherence therebetween.