Abstract: A diffusion based process for tritium removal from water by tritium transfer from water to an elemental hydrogen stream, followed by a membrane diffusion cascade for tritium stripping and enrichment, and final tritium enrichment by one or more thermal diffusion columns. The combination of process steps takes advantage of membrane diffusion's large throughput capability at low tritium concentration with the simplicity of thermal diffusion for small throughput final tritium enrichment. The membrane diffusion stages use supported or unsupported microporous or hydrogen permeable metal membranes (such as Pd/Ag alloy). The diffusion process is compatible with any front-end process to transfer tritium from tritiated water to elemental hydrogen. The process may be designed and operated at low pressure, with small gas inventory, and no inherent overpressure hazard.