Patents Assigned to Specialty Coating Sysetms, Inc.
  • Parylene deposition apparatus including a heated and cooled dimer crucible
    Patent number: 5709753
    Abstract: Chemical vapor deposition apparatus is provided for the quick and efficient deposition of Parylene AF4 onto silicon wafers in the production of semiconductor chips. The apparatus includes a heated and cooled dimer receptacle for fast and efficient vaporization of parylene dimer material.
    Type: Grant
    Filed: October 27, 1995
    Date of Patent: January 20, 1998
    Assignee: Specialty Coating Sysetms, Inc.
    Inventors: Roger A. Olson, William F. Beach, John Wary