Patents Assigned to Speedfam Clean System Co., Ltd
  • Patent number: 6618889
    Abstract: The washing apparatus is based on a process comprising the steps of extracting a plurality of workpieces W to be washed from rows of workpieces arranged longitudinally and at certain intervals in a carrier 10 at intervals of a plurality of workpieces by means of a plurality of lifting arms 21a and 21b; lifting the thus extracted workpieces to respective washing positions at alternately high and low heights; holding the thus lifted workpieces W from both sides thereof by means of rotating pairs of washing rollers 3a and 3b; scrubbing the works in a washing solution 2 by the use of the washing rollers 3a and 3b while forcedly rotating with the driving belt 34 by pressing the works against the driving belt 34 under the action of the rotational force of the washing rollers 3a and 3b; and the workpieces in the carrier 10 are washed by repeating these steps a plurality of times.
    Type: Grant
    Filed: August 30, 2000
    Date of Patent: September 16, 2003
    Assignee: Speedfam Clean System Co., Ltd
    Inventors: Yoshinobu Terui, Hiroji Sato, Noriaki Mizuno
  • Patent number: 6163916
    Abstract: A cleaning apparatus for cleaning disk-shaped workpieces while positively rotating them by a large driving force is equipped with a simple, efficient driving means, a cleaning mechanism 18 for cleaning workpieces W individually formed of an endless driving belt 19 for forcibly rotating a workpiece around an axis, and a pair of cleaning rollers 20 and 20 for clamping both surfaces of a rotating workpiece W from both sides to clean it, the driving belt 19 being curved in the circumferential direction of the workpiece W so as to be brought into linear contact with the outer periphery of the workpiece W.
    Type: Grant
    Filed: June 22, 1999
    Date of Patent: December 26, 2000
    Assignee: Speedfam Clean System Co., Ltd.
    Inventors: Yoshinobu Terui, Hiroji Sato
  • Patent number: 6112355
    Abstract: A washing liquid is continuously supplied upward from the bottom of an inner vessel in such a way that the liquid overflows the top of the vessel while platelike workpieces are entirely immersed in the washing liquid in such a way as to lie parallel with the flow of the liquid. The workpieces are washed in the flow of the washing liquid using washing brushes.
    Type: Grant
    Filed: August 19, 1998
    Date of Patent: September 5, 2000
    Assignee: Speedfam Clean System Co., Ltd.
    Inventors: Shigenori Tsuchida, Minoru Yamahira
  • Patent number: 6058950
    Abstract: A straightening unit 13 including a first straightening vane 21 having a higher penetration resistance and a second straightening vane 22 having a lower penetration resistance is mounted in a box-shaped casing 12 in which only the end surface of said casing is open as an orifice for a washing liquid, thereby forming a sealed liquid-supply chamber 27 behind the straightening unit 13. When the washing liquid from the liquid-supply chamber 27 is passed through the straightening unit 13 under pressure, the first straightening vane 21 provides a uniform flow velocity regardless of the liquid depth, and the second straightening vane 22 alleviates turbulent flow of the washing liquid 5 to make it as uniform as possible.
    Type: Grant
    Filed: August 19, 1998
    Date of Patent: May 9, 2000
    Assignee: Speedfam Clean System Co., Ltd.
    Inventors: Masashi Fujii, Yoshinobu Terui
  • Patent number: 6052855
    Abstract: A plurality of washing sections 6, 7, and 8 for individually washing different portions of a cassette body 111 in a washing liquid 3 using washing brushes 10, 14, and 20, respectively, are sequentially formed in a groove-shaped washing vessel 2 through which the washing liquid 3 flows continuously. A plurality of transfer means 26, 27, and 28 for chucking the cassette body 111 being washed to bring it into contact with the washing brushes 10, 14, and 20, respectively, and for transferring the cassette body 111 that has been washed to the washing section upstream are provided so as to correspond to the washing sections 6, 7, and 8, respectively.
    Type: Grant
    Filed: October 13, 1998
    Date of Patent: April 25, 2000
    Assignee: Speedfam Clean Systems Co., Ltd.
    Inventor: Yoshinobu Terui
  • Patent number: 5893381
    Abstract: Method for scrubbing flat disc-like work pieces in a running wash liquid, by the use of a wash liquid flow vessel 2 maintaining a continuous flow of a wash liquid in one direction, a work carrier 18 for holding a plural number of work pieces 4 in an immersed state and in parallel relation with the flow direction of the wash liquid, a slidable carriage 28 for transferring the work carrier 18 in a direction reverse to the flow direction of the wash liquid, and a scrubber means 20 having scrubbing brushes 38 for washing and scrubbing the work pieces 4 on the carrier 18 in an immersed state in the flow of the wash liquid.
    Type: Grant
    Filed: December 30, 1996
    Date of Patent: April 13, 1999
    Assignee: Speedfam Clean System Co., Ltd.
    Inventor: Yoshinobu Terui
  • Patent number: 5890251
    Abstract: Method and apparatus for scrubbing flat disc-like work pieces in a running wash liquid, by the use of a wash liquid flow vessel 2 maintaining a continuous flow of a wash liquid in one direction, a work carrier 18 for holding a plural number of work pieces 4 in an immersed state and in parallel relation with the flow direction of the wash liquid, a slidable carriage 28 for transferring the work carrier 18 in a direction reverse to the flow direction of the wash liquid, and a scrubber means 20 having scrubbing brushes 38 for washing and scrubbing the work pieces 4 on the carrier 18 in an immersed state in the flow of the wash liquid.
    Type: Grant
    Filed: November 26, 1997
    Date of Patent: April 6, 1999
    Assignee: Speedfam Clean System Co., Ltd.
    Inventor: Yoshinobu Terui
  • Patent number: 5836325
    Abstract: In order to adjust flow conditions of a wash liquid without necessitating replacement of a flow regulator plate, a flow regulator means 8 located downstream of a washing section of a running water type washing machine is constituted by a couple of perforated regulator plates 18 and 19 which are located across the flow passage of the wash liquid in a overlapped state and shiftable relative to the other in the vertical direction for adjustments of the open area defined by the respective water passage apertures.
    Type: Grant
    Filed: September 16, 1996
    Date of Patent: November 17, 1998
    Assignee: Speedfam Clean System Co., Ltd.
    Inventors: Shigeo Akanuma, Masashi Fujii
  • Patent number: 5775350
    Abstract: A flow regulation means 7 for a wash liquid 5 is constituted by first and second regulator plates 11 and 12 in the form of perforated plates and a third regulator plate 13 in the form of a fibrous plate, the first to third regulator plates 11 to 13 being successively located in spaced positions from upstream to downstream side.
    Type: Grant
    Filed: September 16, 1996
    Date of Patent: July 7, 1998
    Assignee: Speedfam Clean System Co., Ltd.
    Inventors: Shigeo Akanuma, Masashi Fujii
  • Patent number: 5727582
    Abstract: A work carrier assembly 1 having first and second carrier members 2 and 3 which are separably engageable with each other. Each one of the two carrier members 2 and 3 is provided with a plural number of parallel work holder rods 11 or 14 between a pair of side frames 10 or 13. The work holder rods 11 and 14 on the two carrier members are located in vertically staggered position and shifted relative to each other in a forward or rearward direction.
    Type: Grant
    Filed: January 3, 1997
    Date of Patent: March 17, 1998
    Assignee: Speedfam Clean System Co., Ltd.
    Inventor: Yoshinobu Terui
  • Patent number: 5709235
    Abstract: Liquid feed section 2 and liquid discharge section 4 of a washing vessel 1 are formed in widths W2 and W4 which are broader than an intermediate washing section 3 with a width W3, and at the same time formed in a greater depth to have bottom surfaces sunken or stepped down from the bottom surface of the washing section 3. Regulator plate holder frames 14 and 20 of upstream and downstream flow regulator means 7 and 8 are located in position by abutting engagement with stepped portions 15 and 21 in such a way that only perforated portions of regulator plates 11, 12, 18 and 19 are disposed in the flow passage to and from the intermediate washing section, precluding flow disturbances which would otherwise be caused by the holder frame or unperforated peripheral portions of the regulator plates.
    Type: Grant
    Filed: September 16, 1996
    Date of Patent: January 20, 1998
    Assignee: Speedfam Clean System Co., Ltd.
    Inventors: Shigeo Akanuma, Yoshinobu Terui
  • Patent number: 5291665
    Abstract: Described herein are method and apparatus using a hot D.I. water bath for drying a wet work, for example, for draining and drying a wet work to dissipate water droplets completely from the work surface subsequent to a washing operation, permitting a high precision drying operation precluding disturbances by air bubbles of the water surface at the time of lifting the work out of the hot D.I. water bath. Prior to sending D.I. water to a heater, it is passed through a deaerator to reduce dissolved gas content to a level lower than a saturated solubility at a given temperature, and then heated to a predetermined temperature to prepare hot D.I. water for supply to the hot D.I. water bath; or alternatively D.I. water is heated to a predetermined temperature and supplied to a hot D.I. water bath through a water feed conduit via a bubble trapping chamber to remove air bubbles therefrom. A wet work is heated by immersion in the hot D.I. water bath and then lifted up to drain and dry same.
    Type: Grant
    Filed: October 4, 1991
    Date of Patent: March 8, 1994
    Assignee: Speedfam Clean Systems, Co., Ltd.
    Inventor: Haruo Yoshikawa