Patents Assigned to Speedfam Company, Ltd.
  • Patent number: 5094037
    Abstract: Described herein is an edge polisher for polishing chamfered edge portions on the front and rear sides of work, including a first machining stage for polishing the front side of work and a second machining stage for polishing the rear side of work, along with mechanisms for supplying, positioning, transferring, reversing and ejecting work. In the first and second machining stages, a work is chucked on each of index units which are mounted on an intermittently rotating index table and revolved around a polishing drum located at the center of the index table, pressing chamfered edge portions of the works against the polishing drum to give a polishing treatment thereto.
    Type: Grant
    Filed: September 26, 1990
    Date of Patent: March 10, 1992
    Assignee: Speedfam Company, Ltd.
    Inventors: Shunji Hakomori, Seiichi Maeda, Isao Nagahashi
  • Patent number: 5065547
    Abstract: A surface processing machine employing a processing tape cartridge for polishing or grinding disks or the like. The machine employs a processing tape cartridge which rotatably accommodates in a casing a pair of reels for the winding of processing tape. The machine comprises a cartridge holder for holding the tape cartridge; a tape drawing mechanism to draw out a portion of the processing tape in the cartridge; a guide roller mechanism for setting and transporting the processing tape on a predetermined path of travel; a work holder mechanism adapted to hold and rotate a work at its machining position; and a tape pressing mechanism for pressing the processing tape against the work.
    Type: Grant
    Filed: June 6, 1989
    Date of Patent: November 19, 1991
    Assignee: Speedfam Company, Ltd.
    Inventors: Tatsuo Shimizu, Kazunori Ozawa, Kenji Yazawa, Kazunori Tani
  • Patent number: 5065548
    Abstract: Described herein is a surface treating tape cartridge packaging a surface treating tape in a casing ready for loading the tape on a surface treating machine, and a surface treating machine capable of automatically loading a surface treating tape in position from such a cartridge, the tape cartridge being basically composed of: a casing formed by separably joined upper and lower halves; and a pair of reels carrying a roll of surface treating tape and rotatably accommodated between the upper and lower halves of the casing.
    Type: Grant
    Filed: June 6, 1989
    Date of Patent: November 19, 1991
    Assignee: Speedfam Company, Ltd.
    Inventors: Tatsuo Shimizu, Kazunori Ozawa, Kenji Yazawa, Kazunori Tani