Abstract: An integrated solar cell and battery are described, together with a process of making the same. The integrated solar cell and battery are made by employing thin film deposition techniques on a substrate. Preferably first, a thin film solar cell is deposited on the substrate, as for example, by sputtering. This step is immediately followed by the deposition of a thin film battery, either onto the previously deposited thin film solar cell, or onto the back side of the substrate. The deposition process lends itself to automated production. The process includes the thin film deposition of series-connected arrays forming different types of integrated solar cells and batteries, depending on their electrical connections so as to vary the respective current and voltage characteristics of the resultant integrated units.