Abstract: A device for spin-coating substrates with liquid media is provided, including a rotatable substrate plate for horizontally supporting a substrate, and a covering unit for covering the substrate during a distribution operation of the liquid medium by means of rotation of the substrate holder. The substrate holder is adapted to be joined tightly to the covering unit, so that passage holes arranged circumferentially on the substrate holder so that an internal coating space, defined by the covering unit and the substrate holder, is in fluid communication with the environment outside the internal space.

Abstract: A device for spin-coating substrates (8) with liquid media is proposed, which comprises a rotatable substrate plate (2) for the horizontal support of a substrate (8), and a covering unit (9) for covering the substrate (8) during a distribution operation of the liquid medium by means of rotation of the substrate holder (2). According to the invention, the substrate holder (2) can be joined tightly to the covering unit (9). In addition, however, passage holes arranged circumferentially are provided, via which the internal coating space (10) formed from covering unit (9) and substrate holder (2) is still connected to the outside.