Patents Assigned to Steag HamaTech APE GmbH & Co. KG
  • Patent number: 7419549
    Abstract: The aim of the invention is to achieve a rapid, homogeneous application of a liquid with as little force as possible to a substrate. To achieve this, the invention provides a nozzle assembly (22) for applying a liquid to a substrate, said assembly having a nozzle body (26) comprising a plurality of nozzles (36) that are substantially arranged in a line and a guide plate (28) that extends essentially in a vertical direction with a straight lower edge. According to the invention, the nozzles (36) above the lower edge are directed towards the guide plate (28) in such a way that a film of liquid forms on the guide plate (28) and flows over the lower edge (64).
    Type: Grant
    Filed: July 10, 2003
    Date of Patent: September 2, 2008
    Assignees: Steag HamaTech APE GmbH & Co. KG, Infineon Technologies AG
    Inventors: Anatol Schwersenz, Werner Saule, Andreas Nöring, Peter Dress, Christian Bürgel, Martin Tschinkl, Marlene Strobl