Patents Assigned to Steag MicroTech GmbH Donaueschingen
  • Method and device for chemically treating substrates
    Patent number: 5569330
    Abstract: A method for treating substrates includes chemically treating at least one substrate in a container with at least one treatment fluid and washing said at least one substrate with a washing fluid in the same container. Subsequently, the at least one substrate is dried.
    Type: Grant
    Filed: January 13, 1995
    Date of Patent: October 29, 1996
    Assignee: Steag MicroTech GmbH Donaueschingen
    Inventors: Robin Schild, Milan Kozak, Johann Durst