Abstract: A method for inspecting integrating circuit or other objects, in which the object is irradiated with an electron beam and in which a detector is caused to detect electrons emitted from the object, to determine the voltage level of the object or some other property at one or more points, or another signal generated upon irradiation. The points or nodes on the object to be inspected are allocated coordinates (x'.sub.i, Y'.sub.i) in a coordinate system x'-y' related to the object where identification points on the object are determined or applied to the object, these identification points also being allocated coordinates (x'.sub.i, y'.sub.i). The object is placed in an electron-microscope type apparatus, where the position of the coordinate system x'- y' in relation to a coordinate system x - y related to the electron microscope is determined, by determining the positions of the identification points relative to the coordinate system x - y.

Abstract: A method of measuring the distance between two objects and/or the speed of one object in relation to the other, the objects incorporating respectively a transmitter-receiver unit and a transponder or reflector, in which method a phase comparison is made between a signal transmitted by the transmitter-receiver unit and a signal received in the transmitter-receiver unit and transmitted from the transponder or reflector. In accordance with the invention the transmitter-receiver unit is caused to transmit signals of microwave frequency, preferably about 2450 MHz, this transmission comprising the transmission of a first signal having a first frequency, the transmission of at least one second signal having a higher or lower frequency, and the transmission of a third signal having the same frequency as the first mentioned signal, wherewith the phase differences .phi.

Abstract: A method for measuring the distance between a first object, which incorporates a transmitter-receiver unit, and a second object, which incorporates a transponder. In accordance with the invention there is transmitted from the transmitter-receiver unit (19) a first microwave signal (S1), which is received in the transponder (18). A second signal (S3) of much lower frequency F.sub.m is generated in the transponder and is modulated on a signal (S6) of microwave frequency in the transponder to form a modulated signal (S7). The modulated signal (S7) is transmitted from the transponder to the transmitter-receiver unit (19), where it is received and mixed down with the first signal (S1) and thereafter is (a) low-pass filtered to form a first measuring signal (S10) having the frequency F.sub.

Abstract: A method of heating glass tubes, particularly quartz tubes for the manufacture of optical fibres, where the tube is pre-heated, preferably by means of a gas flame, whereafter the tube is heated by means of microwave energy generated by a microwave generator (1), by introducing the tube axially into a microwave cavity (3) comprising in its end walls (6,7) or end surfaces openings for the tube. According to the invention, at least one electrical field is given a field image according to a TM-0n0-mode, preferably according to the TM-020-mode, which mode has a maxima (10) along the central axis (9;c-c) of the cavity (3) and a minima (11,12) on each side of and radially spaced from the central axis (9;c-c), where the electrical field portion located between the minima (11,12) is used for heating the wall of the glass tube (8).

Abstract: A method for manufacturing integrated circuits in which conductors and gate structures are built-up on a substrate plate, the conductors incorporating a layer of polycrystalline silicon and the gate structures including a gate electrode of polycrystalline silicon, where each of the gate structures is surrounded by doped source-and-drain-areas and where the gate electrode and the source-and-drain-areas respectively are metallized by depositing thereon a metal which reacts with the silicon from which the gate electrode and the source-and-drain-areas are comprised, so as to form a silicide layer. In accordance with the invention the gate electrode (3) is metallized in a first process stage. The source-and-drain-areas (18, 19) are metallized in a later process stage. Subsequent to metallizing the gate electrode in the first process stage, a protective layer (5) is applied to the metallized layer (4) of the gate electrode in a second process stage.

Abstract: A method for determining a mutual position between two objects, comprising transmitting a microwave signal from the first object towards the second object, causing the second object to receive the transmittal signal and re-transmit a signal, which is caused to be received by the first object. According to the invention the first object includes a transmitter/receiver unit (S/M-unit), which transmits the aforesaid signal (f.sub.o) from a transmitter antenna. The second object (T) is caused to re-transmit the aforesaid signal modulated with a signal (f.sub.m), the first object being caused to receive the transmitted signal through at least two antennae (M.sub.1, M.sub.2) placed symmetrically on a respective side of the transmitter antenna (S) and in an antenna plane common with the transmitter antenna (S). The angle (.theta.

Abstract: A method of heating objects by microwave energy by supplying microwave energy from a generator to a first waveguide. A second waveguide is located, separated from the first waveguide except for at least one parallel and adjacent coupling distance at a common wall between the waveguides. A coupling of microwave energy distributed in the wave propogation direction of the waveguides takes place at the coupling distance so that microwave energy passes from one waveguide to the other one. The second waveguide is dimensioned, so that action of load (objects being heated) conducts microwave energy in the second waveguide with the same wave phase constant as the first waveguide. Objects to be heated are fed only into and out of said second waveguide. A uniform field is fed-in only into the first waveguide. A uniform field distribution and heating profile is obtained and leakage of microwave energy from the open ended second waveguide is avoided.

Abstract: An apparatus for producing a single side band at systems where a signal of a certain frequency is received, frequency-shifted and reflected. The apparatus comprises a modulator (b 26), which includes only one diode (44). To the diode are applied a series of different voltage levels generated in a commutator circuit (41), which voltage levels are at least three in number. A tuning circuit (45) is provided between the diode and an aerial (25). The tuning circuit (45) is adjusted to act upon the amplitude and phase variations occurring at the diode (44) at the different voltage levels applied, so that the reflection coefficients of the diode (44) and the characteristics of the tuning circuit (45) together satisfy the condition for a single side band to be formed and transmitted from the aerial (25).

Abstract: An apparatus for synchronized signal reception wherein a first signal of frequency f.sub.o is transmitted by a first unit and is reflected by a second unit, which thus transmits the reflected second signal. The reflected signal is modulated by information which is supplied by a coding device 27 in said second unit, which coding device generates a coded pulse train 27p in the form consisting of pulses, i.e. information symbols. A pulse generator 28 is controlled by the pulse train to emit a signal with one of two frequencies k.sub.1 and k.sub.2, respectively, in dependence upon the binary state of the pulse train. The signal is divided in a frequency divider 29 to provide frequencies k.sub.1 /n and k.sub.2 /n, respectively, which are supplied to the coding device 27, causing the coding device to emit said pulses with lengths which are related to the cycle lengths of frequencies k.sub.1 /n and k.sub.2 /n, respectively. The signal generated in the pulse generator 28 with the frequencies k.sub.1 and k.sub.

Abstract: A method and an apparatus for accomplishing substantially uniform heating of a dielectric material, e.g., an injection molded plastic, attached to, i.e., filling and engaging the walls of a metal encased cavity using microwave energy supplied simultaneously into the cavity at two different frequencies so that two resonance modes arise within the cavity, the two frequencies being so chosen to differ slightly and so that the resonance modes which arise have no coinciding zero points within the cavity. The apparatus has microwave sources connected by waveguides or coaxial conductors into different locations in the cavity. By avoiding coincidence of zero points of the resonance mode an even uniform heating of the material in the cavity is accomplished.

Abstract: A method and apparatus for measuring the velocity of an object relative to a reference wherein the object has receivers thereon which scan a spatial function which originates from the reference. A signal is developed in each receiver, the value of which is dependent upon the position of the scanning range of the receiver relative to the reference. Signal values from a number of scanning ranges at various positions relative to the object are stored either simultaneously or cyclically at a first instant and then are compared with corresponding signal values obtained at a later time. The displacement of the spatial function relative to the object between the two scanning instants is determined and the velocity of the object is calculated from the magnitude of the displacement and the time elapsing between the scanning instants.