Abstract: A method of producing a transistor having parallel semiconductor nanofingers. The method includes: forming a monocrystalline layer of a semiconductor material on a layer of a subjacent material which can be selectively etched in relation to the monocrystalline layer; etching parallel partitions in the monocrystalline layer and in the subjacent layer and continuing said etching operation in order to hollow out part of the subjacent layer of material; filling the gap between the partitions and the hollowed-out part with a first insulating material; defining a central part of the partitions and removing the first insulating material from around the central part of the monocrystalline layer, thereby forming a finger of semiconductor material; and filling and coating the central part with a conductor material.
Type:
Application
Filed:
August 7, 2006
Publication date:
July 22, 2010
Applicant:
STMICROELECTRINICS CROLLES 2 SAS
Inventors:
Philippe Coronel, Jessy Bustos, Romain Wacquez