Abstract: A method for doping a fin-based semiconductor device is disclosed. In one aspect, the method comprises patterning at least one fin, each fin comprising a top surface and a left sidewall surface and a right sidewall surface. The method further comprises providing a first target surface being the right sidewall of a first block of material. The method further comprises scanning a first primary ion beam impinging on the first target surface with an incident angle ? different from zero degrees and thereby inducing a first secondary ion beam, and doping at least the left sidewall surface and possibly the top surface of the fin opposite to the first target surface with the first secondary ion beam.
Type:
Grant
Filed:
August 22, 2007
Date of Patent:
November 3, 2009
Assignees:
IMEC, STMicroelectronics (Croelles2) SAS
Abstract: A method for doping a fin-based semiconductor device is disclosed. In one aspect, the method comprises patterning at least one fin, each fin comprising a top surface and a left sidewall surface and a right sidewall surface. The method further comprises providing a first target surface being the right sidewall of a first block of material. The method further comprises scanning a first primary ion beam impinging on the first target surface with an incident angle ? different from zero degrees and thereby inducing a first secondary ion beam, and doping at least the left sidewall surface and possibly the top surface of the fin opposite to the first target surface with the first secondary ion beam.
Type:
Application
Filed:
August 22, 2007
Publication date:
February 28, 2008
Applicants:
Interuniversitair Microelektronica Centrum (IMEC) vzw, STMicroelectronics (Croelles2) SAS