Patents Assigned to STMICTOELECTRONICS S.r.l.
  • Patent number: 10683200
    Abstract: A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: June 16, 2020
    Assignee: STMICTOELECTRONICS S.r.l.
    Inventors: Dario Paci, Domenico Giusti, Irene Martini