Patents Assigned to STMmicroelectronics S.A.
  • RAM
    Publication number: 20040191984
    Abstract: A method for forming in monolithic form a DRAM-type memory, including the steps of forming, on a substrate, parallel strips including a lower insulating layer, a strongly-conductive layer, a single-crystal semiconductor layer, and an upper insulating layer; digging, perpendicularly to the strips, into the upper insulating layer and into a portion of the semiconductor layer, first and second parallel trenches, each first and second trench being shared by neighboring cells; forming, in each first trench, a first conductive line according to the strip width; forming, in each second trench, two second distinct parallel conductive lines, insulated from the peripheral layers; filling the first and second trenches with an insulating material; removing the remaining portions of the upper insulating layer; and depositing a conductive layer.
    Type: Application
    Filed: April 2, 2004
    Publication date: September 30, 2004
    Applicant: STMmicroelectronics S.A.
    Inventors: Marc Piazza, Philippe Coronel