Patents Assigned to Stragbaugh
  • Slurry pump control system
    Patent number: 6595829
    Abstract: A CMP slurry pumping system and method which uses the slurry pump inlet pressure as input to the pump controller, and the controller adjusts pump speed to account for variations in inlet pressure.
    Type: Grant
    Filed: February 5, 2001
    Date of Patent: July 22, 2003
    Assignee: Stragbaugh
    Inventor: Chris Melcer