Abstract: To provide a simply-structured multilayer electrostatic actuator that exhibits a sufficient stroke and a sufficient contraction force in a specific drive range, and rapidly hardens upon an attempt to widen the interval between electrodes beyond the drive range. A multilayer electrostatic actuator (1) is configured by a plurality of actuator parts (2a, 2b, 2c) each including: a first film (3a1, 3b1, 3c1) having a plurality of first connection regions (7a1, 7b1, 7c1) formed on one surface in a predetermined pattern; and a second film (3a2, 3b2, 3c2) connected to the first film via the first connection regions, and having a plurality of second connection regions (7a2, 7b2, 7c2) formed on a surface opposite to the first film in the identical pattern. The actuator parts are connected and layered via the second connection regions.

Abstract: The present invention is directed to providing an electrostatic actuator that can generate a large electrostatic force even if composed of a ribbon-shaped electrode film. In an electrostatic actuator 10, 20 including a ribbon-shaped first electrode film 11 and a ribbon-shaped second electrode film 12, a plurality of first electrodes 1 formed of the first electrode film 11 and a plurality of second electrodes 2 formed of the second electrode film 12 are folded and laminated between one end 13 and the other end 14 of the electrostatic actuator 10, 20, and the plurality of first electrodes 1 include a pair of end electrodes 1a that are adjacent to each other in a direction in which the first electrode film 11 extends in a ribbon shape and are respectively positioned at the one end 13 and the other end 14 when laminated and at least one intermediate electrode 1b that is positioned between the end electrodes 1a when laminated.

Abstract: To provide a simply-structured multilayer electrostatic actuator that exhibits a sufficient stroke and a sufficient contraction force in a specific drive range, and rapidly hardens upon an attempt to widen the interval between electrodes beyond the drive range. A multilayer electrostatic actuator (1) is configured by a plurality of actuator parts (2a, 2b. 2c) each including: a first film (3a1, 3b1, 3c1) having a plurality of first connection regions (7a1, 7b1, 7c1) formed on one surface in a predetermined pattern; and a second film (3a2, 3b2, 3c2) connected to the first film via the first connection regions, and having a plurality of second connection regions (7a2, 7b2, 7c2) formed on a surface opposite to the first film in the identical pattern. The actuator parts are connected and layered via the second connection regions. On both the first film and the second film of one actuator part (2a, 2b.

Abstract: A stacked electrostatic actuator exhibits a sufficient contraction force even when pulled by a large external force and the contraction rate thereof does not decrease even under a light load. A stacked electrostatic actuator includes a plurality of electrode films each including a three-layer structure including a first insulating layer, a conductor layer, and a second insulating layer.

Abstract: The present invention is directed to providing an electrostatic actuator that can generate a large electrostatic force even if composed of a ribbon-shaped electrode film. In an electrostatic actuator 10, 20 including a ribbon-shaped first electrode film 11 and a ribbon-shaped second electrode film 12, a plurality of first electrodes 1 formed of the first electrode film 11 and a plurality of second electrodes 2 formed of the second electrode film 12 are folded and laminated between one end 13 and the other end 14 of the electrostatic actuator 10, 20, and the plurality of first electrodes 1 include a pair of end electrodes 1a that are adjacent to each other in a direction in which the first electrode film 11 extends in a ribbon shape and are respectively positioned at the one end 13 and the other end 14 when laminated and at least one intermediate electrode 1b that is positioned between the end electrodes 1a when laminated.

Abstract: A stacked electrostatic actuator exhibits a sufficient contraction force even when pulled by a large external force and the contraction rate thereof does not decrease even under a light load. A stacked electrostatic actuator includes a plurality of electrode films each including a three-layer structure including a first insulating layer, a conductor layer, and a second insulating layer.

Abstract: Provided is a stacked electrostatic actuator capable of maintaining insulation performance between conductor layers even when an elastic layer is deformed due to a creep phenomenon. An electrostatic actuator includes a plurality of electrode films that are stacked and bonded, wherein each of the electrode films has a five-layer structure including an elastic layer, an insulating layer, a conductor layer, an insulating layer, and an elastic layer, a Young's modulus of a material for forming the elastic layers is smaller than a Young's modulus of a material for forming the insulating layers, and a spring constant of a material for forming the elastic layers increases as the electrode films extend in a stacking direction.

Abstract: There are provided a plurality of first electrode plates in each of which an adhesive is applied on one surface in a first pattern, and a plurality of second electrode plates in each of which the adhesive is applied on one surface in a second pattern which is different from the first pattern, in which the plurality of first electrode plates and the plurality of second electrode plates are alternately stacked without causing the surfaces on which the adhesive is applied to face each other.

Abstract: There are provided a plurality of first electrode plates in each of which an adhesive is applied on one surface in a first pattern, and a plurality of second electrode plates in each of which the adhesive is applied on one surface in a second pattern which is different from the first pattern, in which the plurality of first electrode plates and the plurality of second electrode plates are alternately stacked without causing the surfaces on which the adhesive is applied to face each other.