Patents Assigned to STREAM MOSAIC, INC.
  • Process control techniques for semiconductor manufacturing processes
    Patent number: 10430719
    Abstract: Techniques for measuring and/or compensating for process variations in a semiconductor manufacturing processes. Machine learning algorithms are used on extensive sets of input data, including upstream data, to organize and pre-process the input data, and to correlate the input data to specific features of interest. The correlations can then be used to make process adjustments. The techniques may be applied to any feature or step of the semiconductor manufacturing process, such as overlay, critical dimension, and yield prediction.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: October 1, 2019
    Assignee: STREAM MOSAIC, INC.
    Inventor: Jeffrey Drue David
  • PROCESS CONTROL TECHNIQUES FOR SEMICONDUCTOR MANUFACTURING PROCESSES
    Publication number: 20180358271
    Abstract: Techniques for measuring and/or compensating for process variations in a semiconductor manufacturing processes. Machine learning algorithms are used on extensive sets of input data, including upstream data, to organize and pre-process the input data, and to correlate the input data to specific features of interest. The correlations can then be used to make process adjustments. The techniques may be applied to any feature or step of the semiconductor manufacturing process, such as overlay, critical dimension, and yield prediction.
    Type: Application
    Filed: November 25, 2015
    Publication date: December 13, 2018
    Applicant: STREAM MOSAIC, INC.
    Inventor: Jeffrey Drue DAVID