Abstract: A carbon nanotube array constituted by large numbers of carbon nanotubes vertically aligned on a substrate is produced by supplying a carbon source gas into a reaction vessel having a hydrogen gas atmosphere, in which a substrate on which a reaction catalyst comprising fine metal particles is formed is placed; forming large numbers of vertically aligned carbon nanotubes on the substrate by keeping a reaction temperature of 500-1100° C. for 0.5-30 minutes; and heat-treating the carbon nanotubes by stopping the supply of the carbon source gas and keeping 400-1100° C. for 0.5-180 minutes in a non-oxidizing atmosphere.

Abstract: A carbon nanotube array constituted by large numbers of carbon nanotubes vertically aligned on a substrate is produced by supplying a carbon source gas into a reaction vessel having a hydrogen gas atmosphere, in which a substrate on which a reaction catalyst comprising fine metal particles is formed is placed; forming large numbers of vertically aligned carbon nanotubes on the substrate by keeping a reaction temperature of 500-1100° C. for 0.5-30 minutes; and heat-treating the carbon nanotubes by stopping the supply of the carbon source gas and keeping 400-1100° C. for 0.5-180 minutes in a non-oxidizing atmosphere.