Patents Assigned to Sumimoto Mitsubishi Silicon Corporation
  • Apparatus for manufacturing silicon single crystal, method for manufacturing silicon single crystal, and silicon single crystal
    Publication number: 20060027160
    Abstract: The apparatus for manufacturing a silicon single crystal includes: a crucible for storing molten silicon; a pulling-up device for pulling up a silicon single crystal from the molten silicon in the crucible to grow; a detecting device for detecting a position of the crucible in a vertical direction; and a control device for controlling a pulling rate for the silicon single crystal by the pulling-up device, based on the detected position of the crucible.
    Type: Application
    Filed: July 29, 2005
    Publication date: February 9, 2006
    Applicant: Sumimoto Mitsubishi Silicon Corporation
    Inventors: Youji Suzuki, Satoshi Sato