Abstract: There is provided an optical waveguide device including: a substrate; an optical waveguide formed on the substrate; and a working electrode that controls a light wave propagating through the optical waveguide, in which the working electrode includes a first base layer made of a first material, a first conductive layer on the first base layer, a second base layer made of a second material different from the first material, which is on the first conductive layer, and a second conductive layer on the second base layer, and an edge of the second base layer is covered with the second conductive layer, in a cross-section perpendicular to an extending direction of the optical waveguide.

Abstract: Surface-modified zinc oxide particles of the disclosure are surface-modified zinc oxide particles in which the particle surfaces of zinc oxide particles are treated with a hydrolyzable surface treatment agent, in which the color difference ?E before and after irradiation with simulated sunlight is 4.0 or lower.

Abstract: An optical waveguide device in which an optical loss is reduced by removing an air bubble inside an adhesive layer for joining a reinforcing member from near an optical waveguide or the like even in a case where a protruding part such as a rib type optical waveguide or a spot size converter is formed on an optical waveguide substrate is provided. An optical waveguide device includes an optical waveguide substrate (1, 2) provided with an optical waveguide (10, 12), and a reinforcing member (3) disposed on an upper side of the optical waveguide (10, 12) near an end portion of the optical waveguide (10, 12), the optical waveguide substrate (1, 2) and the reinforcing member (3) being joined through an adhesive layer (4), in which a protective layer (13) that covers the optical waveguide (10, 12) is provided on the optical waveguide (10, 12) positioned on a lower side of the reinforcing member (3), and the adhesive layer (4) is disposed outside the protective layer (13).

Abstract: An optical modulator includes a relay substrate having signal conductor patterns that connect signal input terminals and signal electrodes of an optical modulation element and ground conductor patterns, and a housing, in which the signal conductor pattern includes a component mounting portion including an electrical circuit element. Two ground conductor patterns sandwiching the signal conductor pattern are formed in an asymmetrical shape in a plan view within a component mounting area having a square shape in the plan view centered on the component mounting portion. A direction of a side of the component mounting area having the square shape is same as the extending direction of the signal conductor pattern and a length of a side of the component mounting area is equal to a distance from a center of the component mounting portion to a portion on an adjacent signal conductor pattern closest to the center.

Abstract: Provided is an optical modulator that can be driven at lower voltage through the use of differential signal output. An optical modulator includes a substrate 1 and optical waveguides (21, 22) and a control electrode that are formed on the substrate, in which the optical waveguide includes Mach-Zehnder type optical waveguide, the control electrode is provided with two ground electrodes sandwiching three signal electrodes; the three signal electrodes are constituted by second and third signal electrodes that sandwich a first signal electrode, and have a wiring structure in which one modulation signal of the differential signal is applied to the first signal electrode, and the other modulation signal of the differential signal is applied to the second and third signal electrodes; and one branched waveguide (21) out of two Mach-Zehnder type optical waveguides is disposed between the first and second signal electrodes, and the other branched waveguide (22) is disposed between the first and third signal electrodes.

Abstract: An electrostatic chuck device comprising: a plate-shaped electrostatic chuck part which has an electrostatic adsorption electrode provided therein and has a mounting surface on which a plate-shaped sample is mounted; and a base part which supports the electrostatic chuck part on a support surface thereof from an opposite side of the mounting surface, wherein the base part has a disk shape which has a central axis at a center thereof, and a coolant channel extending along the support surface is provided inside the base part, wherein the coolant channel includes an outer peripheral channel which overlaps an outer edge of the plate-shaped sample when viewed from an axial direction of the central axis, and an inner peripheral channel which is disposed on an inner side in a radical direction than the outer peripheral channel, wherein at least a portion of the inner peripheral channel extends spirally around the central axis, and a channel cross-sectional area of the inner peripheral channel decreases as a distance

Abstract: Provided is an optical waveguide element including spot size conversion means with suppressed optical insertion loss without complicating a manufacturing process.

Abstract: An optical modulator that can suppress crosstalk of a modulation signal even in a case where a wiring substrate is disposed to overlap with a modulation substrate is provided. An optical modulator includes a modulation substrate 1 that includes an optical waveguide and a modulation electrode 10 for modulating a light wave which propagates through the optical waveguide, and a wiring substrate 2 provided with wiring 22 for relaying a modulation signal to be applied to the modulation electrode 10, in which the wiring substrate is disposed to overlap with the modulation substrate to cover an action portion on which modulation is performed by the modulation electrode, and an electromagnetic wave absorption member SH is disposed at at least a part of a position facing the action portion in the wiring substrate.

Abstract: An optical modulation element that can be housed in the same housing together with an electronic circuit is implemented without deteriorating the high-frequency characteristics and the optical modulation characteristics and without increasing a size of the housing.

Abstract: An electrostatic chuck device includes: an electrostatic chuck part having a sample placing surface on which a sample is placed and having a first electrode for electrostatic attraction; a cooling base part placed on a side opposite to the sample placing surface with respect to the electrostatic chuck part to cool the electrostatic chuck part; and an adhesive layer that bonds the electrostatic chuck part and the cooling base part together, in which the electrostatic chuck part has a recess and protrusion on the adhesive layer side, and a sheet resistance value of the first electrode is higher than 1.0?/? and lower than 1.0×1010?/?.

Abstract: A dispersion liquid according to the present invention contains metal oxide particles which have been surface-modified by at least one kind of silane compound and a solvent, the silane compound contains a methyl group or a methyl group and a hydrocarbon group having 2 or more carbon atoms, in a case where a transmission spectrum of the metal oxide particles that are obtained by drying the dispersion liquid by vacuum drying is measured within a wavenumber range of 800 cm?1 to 3,800 cm?1 with a Fourier transform infrared spectrophotometer, and values of the transmission spectrum are standardized such that a maximum value of the transmission spectrum in the range is 100 and a minimum value is 0, the following expression (1) is satisfied. IA/IB?3.

Abstract: In a dispersion liquid according to the present invention, regarding metal oxide particles that are obtained by vacuum-drying a dispersion liquid containing metal oxide particles which have been surface-modified by a methyl group and a phenyl group in a predetermined ratio, in a case where a transmission spectrum in a wavenumber range of 800 cm?1 or higher and 3,800 cm?1 or lower is measured by FT-IR, and values of the transmission spectrum are standardized, IA/IB?3.5 is satisfied (IA represents a spectrum value standardized at 3,500 cm?1, and IB represents a spectrum value standardized at 1,100 cm?1).

Abstract: An electrostatic chuck device includes: a mounting table provided with amounting surface on which a plate-shaped sample is mounted; an annular focus ring; and a cooling element for cooling the focus ring, in which the mounting table has a holding portion provided to surround the mounting surface, and the holding portion includes an annular groove surrounding the mounting surface, and a through-hole that is open on a bottom surface of the groove, wherein a tubular insulator has been inserted into the through-hole, the holding portion has upper surfaces, which are located on both sides of the groove in a width direction, as holding surfaces that are in contact with the focus ring and hold the focus ring, wherein the holding surface satisfies the following conditions (i) to (iii); (i) surface roughness is 0.05 ?m or less, (ii) a flatness is 20 ?m or less, and (iii) the holding surface does not have a recess having a depth of 1.0 ?m or more and extending in a direction intersecting the holding surface.

Abstract: This composite sintered body is a ceramic composite sintered body which includes aluminum oxide which is a main phase, and silicon carbide which is a sub-phase, the composite sintered body including an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at an interface between a crystal grain of the aluminum oxide and a crystal grain of the silicon carbide in a grain boundary.

Abstract: The electrostatic chuck device includes: a base having one main surface serving as a mounting surface on which a plate-shaped sample is mounted; and an electrode for electrostatic attraction provided on a side opposite to the mounting surface in the base or in an interior of the base, in which the electrode for electrostatic attraction is made of a composite sintered body that includes a matrix phase having insulation properties and a dispersed phase having a lower volume resistivity value than the matrix phase, in any cross section of the composite sintered body, a region of the dispersed phase, which is surrounded by the matrix phase and is independent, includes aggregated portions having a maximum Feret diameter of 30 ?m or more, and one or more of the aggregated portions are present in a range of 2500 ?m2 in any cross section of the sintered body.

Abstract: A ceramic joined body includes: a pair of ceramic plates; and an electrode layer that is interposed between the pair of ceramic plates, in which the electrode layer is embedded in at least one of the pair of ceramic plates, and in an outer edge of the electrode layer, a joint surface between the at least one of the pair of ceramic plates and the electrode layer has an inclination with respect to a thickness direction of the pair of ceramic plates and the electrode layer.

Abstract: An optical modulator that suppresses poor welding between a case main body and a lid portion is provided.

Abstract: In a dispersion liquid according to the present invention, regarding metal oxide particles that are obtained by vacuum-drying a dispersion liquid containing the metal oxide particles which have been surface-modified by at least one kind of a silane compound containing a methyl group and a hydrocarbon group having 2 or more carbon atoms and at least one kind of silicone compound, in a case where a transmission spectrum in a wavenumber range of 800 cm-1 or higher and 3,800 cm-1 or lower is measured by FT-IR, and values of the transmission spectrum are standardized, the following expression (1) is satisfied. IA/IB ? 3.5 (1) (“IA” represents a spectrum value standardized at 3,500 cm-1, and “IB” represents a spectrum value standardized at 1,100 cm-1).

Abstract: This electrostatic chuck device (1) includes a base (11) having one main surface serving as a mounting surface (19) on which a plate-shaped sample is mounted, and an electrode for electrostatic attraction (13) provided on the side opposite to the mounting surface (19) in the base (11), in which the base (11) consists of a ceramic material as a forming material, and the ceramic material contains aluminum oxide and silicon carbide as main components thereof, and has a layered graphene present at a grain boundary of the aluminum oxide.

Abstract: An optical modulator with which electrical connection between a signal electrode and signal wiring of a wiring substrate can be reliably made even in a case where a width of the signal electrode in an action portion of an optical control substrate is narrow is provided.