Abstract: A vibrator 10, which is formed in a silicon wafer 1 by means of MEMS technique, has eight beam portions (beams) 12 supported at a central portion 11 and extending in the radial direction while mutually keeping the same angle and has a ring portion 13 connected to the eight beam portions 12. Outside the ring portion 13, eight electrodes 21a to 21h for electrostatic actuation, capacitance detection, or the like are spaced uniformly with a gap 22 created between the ring portion 13 and the electrodes 21a to 21h. Inside the ring portion 13, sixteen electrodes 23 for frequency adjustment are spaced uniformly with a gap 24 created between the ring portion 13 and the electrodes 23.

Abstract: This is a discharge cell used for an ozonizer. A space where a discharge gap amount is determined between the first electrodes 10 and 10 is formed by stacking a couple of upper and lower first electrodes 10 and 10, constituted by the plate-like rigid body, in both sides with sandwiching a couple of rigid body spacers 20 and 20. In this space, a dielectric body unit 30 that consists of a rigid body of the sandwich structure of sandwiching a second electrode 32 is arranged between glass plates 31 and 31. The dielectric body unit 30 is supported in a neutral position in the space by a plurality of spacers 40, 40, . . . for discharge gap formation that are inserted between the upper and lower first electrodes 10, and forms discharge gaps 50 and 50 in both sides. The minimum discharge gap amount G of 0.4 mm or less is stably secured. It is possible to prevent the damage of a cell component and a pressurizing mechanism.