Abstract: The invention relates to an improved process to manufacture TCS in a polysilicon plant based upon combining a high temperature FBR process reacting metallurgical grade silicon, hydrogen, and silicon tetrachloride (STC) to make trichlorosilane (TCS) and a high temperature thermal converter to hydrogenate STC to TCS and hydrogen chloride.
Type:
Grant
Filed:
December 10, 2014
Date of Patent:
October 24, 2017
Assignee:
Summit Process Design, Inc.
Inventors:
Sumeet Dharampal Gandhi, Bruce Hazeltine