Patents Assigned to SUNIC SYSTEMS, LTD.
  • Patent number: 9797038
    Abstract: An apparatus for depositing an organic material includes: a main chamber; a first substrate loading section in which a first substrate is loaded in the first radial direction and seated; a second substrate loading section in which a second substrate is loaded in the second radial direction and seated; a scanner including a linear organic material deposition source, a source moving means to which the organic material deposition source is coupled to linearly move the organic material deposition source so that the organic material particles are injected onto the surface of the first substrate or the second substrate, and a rotating means for rotating the source moving means; and a scanner moving means for moving the scanner back and forth so that the scanner is positioned in the first deposition region or the second deposition region.
    Type: Grant
    Filed: March 26, 2013
    Date of Patent: October 24, 2017
    Assignee: SUNIC SYSTEMS, LTD.
    Inventors: Chang Sik Choi, Young Im, Young Jong Lee, Seong Ho Kim, Sun Hyuk Kim, Jung Gyun Lee, In Ho Hwang