Abstract: A nanoimprinting apparatus for imprinting nanostructure on a workpiece. The apparatus comprises a frame, a platen, an embossing tool, and a separating tool. The platen is connected to the frame for separating the workpiece. The embossing tool is connected to the frame for imprinting nanostructure on the workpiece. The separating tool is connected to the frame for separating the workpiece and embossing tool. The separating tool has a workpiece engagement surface for engaging the workpiece when separating the workpiece and embossing tool. The embossing tool extends through the separating tool.