Patents Assigned to SUSS MicroTec Tech Systems GmbH
  • Method and apparatus for controlling the temperature of electronic components
    Patent number: 7671615
    Abstract: In a method and an apparatus for measuring temperature-controlled electronic components in a test station, a component to be measured is held and positioned using a chuck, has a temperature-controlled and directed fluid flow applied to it and is electrically contact-connected using probes and is measured. The setting of the temperature of the component to the temperature at which the measurement is intended to be carried out is effected solely using a directed fluid flow at a defined temperature.
    Type: Grant
    Filed: August 16, 2007
    Date of Patent: March 2, 2010
    Assignee: SUSS MicroTec Tech Systems GmbH
    Inventors: Carel van de Beek, Stefan Kreissig, Volker Hansel, Sebastian Giessmann, Frank-Michael Werner, Claus Dietrich, Jorg Kiesewetter