Abstract: The present invention relates to a micromachined hemispherical resonance gyroscope, which includes a resonant layer, wherein the resonant layer comprises a hemispherical shell whose top point of the hemispherical shell is its anchor point; several silicon hemispherical electrodes are arranged around the hemispherical shell, the silicon hemispherical electrodes include driving electrodes, equilibrium electrodes, shielded electrodes and signal detection electrodes or quadrature correction electrodes, the hemispherical shell and the several silicon spherical electrodes which surround the hemispherical shell constitute several capacitors.
Type:
Grant
Filed:
November 16, 2017
Date of Patent:
November 20, 2018
Assignee:
SUZHOU WENZHIXIN MICRO SYSTEM TECHNOLOGY CO., LTD
Abstract: The present invention relates to a micromachined hemispherical resonance gyroscope, which includes a resonant layer, wherein the resonant layer comprises a hemispherical shell whose top point of the hemispherical shell is its anchor point; several silicon hemispherical electrodes are ananged around the hemispherical shell, the silicon hemispherical electrodes include driving electrodes, equilibrium electrodes, shielded electrodes and signal detection electrodes or quadrature correction electrodes, the hemispherical shell and the several silicon spherical electrodes which sunound the hemispherical shell constitute several capacitors.
Type:
Application
Filed:
November 16, 2017
Publication date:
June 14, 2018
Applicant:
SUZHOU WENZHIXIN MICRO SYSTEM TECHNOLOGY CO., LTD
Abstract: The present invention relates to a micromachined hemispherical resonance gyroscope, which comprises a resonant layer, said resonant layer comprising a hemispherical shell which has a concave inner surface and an outer surface opposite to the inner surface, and top point of the hemispherical shell being its anchor point; several silicon hemispherical electrodes being arranged around said hemispherical shell, the silicon hemispherical electrodes including driving electrodes, equilibrium electrodes, signal detection electrodes and shielded electrodes, the shielded electrodes separating the driving electrodes and the equilibrium electrodes from the signal detection electrodes, the hemispherical shell and the several silicon spherical electrodes which surround the hemispherical shell constituting several capacitors; the resonant layer being made of polysilicon or silica or silicon oxide or diamond.
Type:
Application
Filed:
August 31, 2012
Publication date:
February 9, 2017
Applicant:
Suzhou Wenzhixin Micro System Technology co., Ltd.