Patents Assigned to SwissProbe A G
  • Sensor with cantilever and optical resonator
    Publication number: 20050264825
    Abstract: An optical sensor, in particular for a scanning force microscope, measures the deflection of a cantilever (3) using an optical resonator between the cantilever (3) and an output surface (12b) of a lens assembly (10). In order to form the resonator, output surface (12b) is concave and parallel to the wavefronts of the light within the resonator. This design provides a resonator of high stability and allows to keep the distance between lens assembly (10) and cantilever (3) comparatively large.
    Type: Application
    Filed: August 14, 2002
    Publication date: December 1, 2005
    Applicant: SwissProbe A G
    Inventors: Patrick Louis Frederix, Hans Hug