Abstract: An aluminum over silicon barrier extends over the lateral edges of an integrated circuit chip into adjacent scribe lines forming an edge barrier.
Type:
Grant
Filed:
May 16, 1980
Date of Patent:
December 14, 1982
Assignee:
Synertek
Inventors:
Paul W. Smith, James J. Freeman, Donald D. Forsythe, Megha Shyam, Kenneth K. Yagura, Gunnar Wetlesen