Abstract: A method and system for high-speed, high-resolution, 3-D imaging of an object including an anamorphic magnification and field lens system to deliver the light reflected from the object to a small area position detector having a position-sensing direction. Preferably, an acousto-optic deflector together with associated lens elements scans a beam of modulated laser light across the object to produce a telecentric, flat field scan. The deflector has a feedback loop to enable uniform illumination of the object. The light scattered from the object is collected by a telecentric receiver lens. A combined spatial and polarization filtering plane preferably in the form of a programmable mask is provided to control the polarization and acceptance angles of the collected light. A reduction or focusing lens is positioned immediately behind the filtering plane and is utilized as a telescope objective.

Abstract: A method and system are disclosed for automatically visually inspecting an article such as an electronic circuit wherein both reference and non-reference algorithms are utilized to detect circuit defects. The system includes a pipelined cellular image processor which is utilized to implement the non-reference algorithm and an arithmetic logic unit (ALU) is coupled to the output of the cellular image processor to perform the reference method. The non-reference method includes a spaces and traces algorithm and the reference method includes a topology matching algorithm. The system also includes an algorithm for locating and gauging critical areas of the circuit with sub-pixel accuracy.

Abstract: A method and system for high-speed, 3-D imaging of an object at a vision station including a flying spot laser scanner, a dynamically configurable spatial filter and a diffuser for spatial averaging, are used in conjunction with a variable transmission filter in an optical depth sensing system. The reflected laser signal received by the sensing system is first spatially filtered and averaged and then split into first and second beams which are imaged onto a pair of highly sensitive photodetectors which introduce capability for high-speed, 3-D sensing under low light level conditions. The first beam passes through a variable transmission filter which is used to encode position which, in turn, is proportional to the height of the object. The second or reference split beam is provided to compensate for changes in the reflectance of the object and the power of the laser scanner.